Orientation determination and mapping by stage rocking electron channeling and imaging reconstruction

Abstract

A system to generate orientation maps includes a measurement system configured to capture a plurality images of a sample and a computing device in operable communication with the measurement system. The computing device is configured to align the plurality of images of the sample and process the aligned plurality of images to detect one or more regions of interest. The computing device is also configured to generate one or more electron channeling patterns (ECPs) corresponding to the sample based on the one or more regions of interest. The computing device is further configured to generate an orientation map of the sample based on the one or more ECPs.

Dependencies are inferred from the claim text.