Profile measurement system and profile measurement method
AssigneeIndustrial Technology Research Institute
InventorsLudovic Angot, Yueh-Yi Lai
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AssigneeIndustrial Technology Research Institute
InventorsLudovic Angot, Yueh-Yi Lai
Estimating the term…
System and method for profile measurement are provided. The profile measurement system includes a light projector, an imaging device, a control system, and a processing unit. The light projector includes a light source, a mask, and an optical system. An aperture of the mask allows a portion of light to pass through and generates a pattern. The optical system includes a variable focal length lens element configured to project the pattern at different projection distances. The imaging device is configured to capture images of the pattern projected at the different projection distances. The control system is configured to control a projection distance of the light projector and a focus distance of the imaging device. The processing unit is configured to obtain in-focus pixels in the captured images, generate mask images, reconstruct a large depth of field pattern image based on the captured images and reconstruct the object profile.
A profile measurement system comprising:
A profile measurement method comprising:
Dependencies are inferred from the claim text.