Polishing composition for magnetic disk substrate
AssigneeYamaguchi Seiken Kogyo Co., Ltd.
InventorJunichiro ANDO
Life of this patent
Estimating the term…
Loading patent…
AssigneeYamaguchi Seiken Kogyo Co., Ltd.
InventorJunichiro ANDO
Estimating the term…
Embodiments provide a polishing composition for a magnetic disk substrate, the polishing composition containing colloidal silica, at least one of a phosphorus-containing inorganic acid and a phosphorous-containing organic acid, and water. According to at least one embodiment, the colloidal silica in the polishing composition has an average particle diameter (D50) in the range of 5 to 50 nm observed by a transmission electron microscope. In measuring a volume-based particle size distribution of the colloidal silica by dynamic light scattering, when the particle size distribution is measured by adjusting a concentration of colloidal silica particles to be 0.25 mass %, the colloidal silica contains 10 vol % or less of colloidal silica particles larger than 50 nm. The polishing composition has 1 to 50 mass % of the colloidal silica, and the pH (25° C.) in the range of 0.1 to 4.0. The colloidal silica is stabilized by sodium or ammonium.
A polishing composition for a magnetic disk substrate, comprising:
Dependencies are inferred from the claim text.