Metal organic compounds
AssigneeUmicore AG & Co. KG
InventorsNicholas RAU, Joerg SUNDERMEYER, Andreas RIVAS NASS, Ralf KARCH, Annika FREY, Angelino DOPPIU, Eileen WOERNER
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Abstract
The invention relates to the synthesis and provision of a new class of volatile metal organic compounds based on bis(alkylimine)glyoxal and bis(dialkylhydrazone)glyoxal ligands in combination with cyclopentadienide and alkyl ligands for use in ALD and CVD processes.
Claims30
Compound of the general formula
- that can also be represented by the general formula
- [(CpR21R22R23R24R25)Ru(R4R5(DAD)R6R7)R3], wherein
- R3 can be selected from the group consisting of H, C1-C6 linear alkyl, C3-C6 branched alkyl, C3-C6 cyclic alkyl, C3-C6 vinyl, C3-C6 allyl, C3-C6 alkenyl;
- (R4R5(DAD)R6R7) represents a chelating 1,4-diazadiene or its bis-hydrazone derivative of the general formula (R4)—N═CR5—CR6═N—(R7) wherein
- R4 and R7, can be independently selected from the group consisting of C1-C6 linear alkyl, C3-C6 branched alkyl, C3-C6 cyclic alkyl;
- or
- R4 can be (R8,R9)N— and R7 can be (R12,R13)N—, and R8, R9, R12 and R13 can be independently selected from the group consisting of H, C1-C6 linear alkyl, C3-C6 branched alkyl, or two neighbouring groups, such as R8 and R9 or R12 and R13, do together form a C3-C6 saturated or unsaturated cyclic alkyl, which may contain a heteroatom selected from O or S;
- R5 and R6 can be independently selected from the group consisting of H, C1-C6 linear alkyl, C3-C6 branched alkyl, C3-C6 cyclic alkyl;
- R21, R22, R23, R24 and R25 are, independently from each other, selected from the group consisting of H, C1-C6 linear alkyl, C3-C6 branched alkyl, C3-C6 cyclic alkyl and NR312, wherein R31 is selected from the group consisting of H, C1-C6 linear alkyl, C3-C8 branched alkyl, C3-C6 cyclic alkyl and C3-C6 aryl;
- or two of R21, R22, R23, R24 and R25 are interconnected by a C3 to C6 alkyl, alkenyl, alkadienyl or alkatrienyl forming an annelated ring that can be substituted or unsubstituted.
Method according to claim 18, wherein step a) is carried out in the presence of pure oxygen and at least one of [(CpR21R22R23R24R25)Ru(P(R38)3)2X], [(CpR21R22R23R24R25)Ru((R3S)P—R402)2X] and [(CpR21R22R23R24R25)Ru((R33)2P—R40)2X] Is employed.
Method for the production of a compound of formula [(CpR21R22R23R24R25)Ru(R4R5(DAD)R6R7)X] comprising the step:
- a) reacting at least one of [(CpR21R22R23R24R25)Ru(P(R38)3)2X], [(CpR21R22R23R24R25)Ru((R33)P—R402)2X] and [(CpR21R22R23R24R25)Ru((R39)2P—R40)2X] with R4R5(DAD)R6R7 to obtain [(CpR21R22R23R24R25)Ru(R4R5(DAD)R6R7)X] in the presence of pure oxygen, wherein X is selected from the group consisting of F, Cl, Br and I and wherein R39 and R40 are different from each other and wherein R38, R39 and R40 are selected from the group consisting of substituted or unsubstituted C1-C6 alkyl, substituted or unsubstituted C1-C6 alkyloxy, substituted or unsubstituted C1-C6 alkenyl, substituted or unsubstituted C1-C6 alkinyl, substituted or unsubstituted C1-C6 alkadienyl, substituted or unsubstituted C3-C6 cycloalkyl, substituted or unsubstituted C5-C10 aryl, substituted or unsubstituted C5-C10 aryloxy and combinations thereof, in particular substituted with one, two or three substituents selected from the group consisting of ethyl, methyl, propyl, isopropyl, butyl, tert-butyl, and combinations thereof, and wherein specifically can be ethyl, methyl, propyl, isopropyl, butyl, tert.-butyl, cyclohexyl, phenyl, tri-ortho-tolyl, tri-mete-tolyl, tri-para-tolyl, methoxy, ethoxy, phenyloxy and combinations thereof.
Dependencies are inferred from the claim text.