Low-k material and method for manufacturing the same
AssigneeIndustrial Technology Research Institute
InventorsKuo-Chuang CHIU, Tzu-Yu LIU, Tien-Heng HUANG, Tzu-Chi CHOU, Cheng-Ting LIN
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Abstract
A method of forming low-k material is provided. The method includes providing a plurality of core-shell particles. The core of the core-shell particles has a first ceramic with a low melting point. The shell of the core-shell particles has a second ceramic with a low melting point and a low dielectric constant. The core-shell particles are sintered and molded to form a low-k material. The shell of the core-shell particles is connected to form a network structure of a microcrystal phase.
Claims20
A method of forming low-k material, comprising:
- providing a plurality of core-shell particles, wherein the core of the core-shell particles has a first ceramic with a low melting point, and the shell of the core-shell particles has a second ceramic with a low melting point and a low dielectric constant;
- sintering the core-shell particles to mold the core-shell particles for forming a low-k material, wherein the shell of the core-shell particles is connected to form a network structure of a microcrystal phase.
A low-k material, comprising:
- a first ceramic with a low melting point dispersed in a second ceramic with a low melting point and a low dielectric constant, wherein the second ceramic are connected to form a network structure of a microcrystal phase.
Dependencies are inferred from the claim text.