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US 2021/0198103 A1Published application
Surface micromachined structures
AssigneeTexas Instruments Incorporated
InventorsPatrick Ian Oden, James Norma Hall
Life of this patent
Estimating the term…
Abstract
Described examples include an apparatus having a substrate with a substrate surface. The apparatus also includes an element with a planar surface facing the substrate surface and with a nonplanar surface opposite the planar surface facing away from the substrate surface.
Claims25
An apparatus comprising:
- a substrate having a substrate surface;
- and
- an element having a planar surface facing the substrate surface and having a nonplanar surface opposite the planar surface facing away from the substrate surface.
An apparatus comprising:
- a substrate having a substrate surface;
- a mirror having a planar surface facing the substrate surface and having a nonplanar surface opposite the planar surface facing away from the substrate surface;
- and
- a via on the substrate surface separating the mirror and the substrate.
1 more element
A method comprising:
- forming a sacrificial layer on a substrate;
- forming a via opening in the sacrificial layer;
- forming an element layer on a surface of the sacrificial layer and in the via opening;
- forming a photoresist layer on the element layer;
- exposing the photoresist layer to laterally varying light;
- etching the photoresist layer such that the photoresist layer has a surface contour in a pattern according to the laterally varying light;
- etching the photoresist layer and the element layer to transfer the surface contour from the photoresist layer to the element layer;
- patterning the element layer into an element;
- and
- removing the sacrificial layer.
7 more elements
An apparatus comprising:
- a substrate having a substrate surface;
- and
- mirror elements on the substrate surface, at least some of the mirror elements including:
- a mirror having a planar surface facing the substrate surface and having a nonplanar surface opposite the planar surface facing away from the substrate surface;
- and
- a via on the substrate surface separating the mirror and the substrate.
3 more elements
Dependencies are inferred from the claim text.