Spatial light modulator (slm) comprising integrated digital-to-analog converters
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorsPeter DUERR, Thomas PRESBERGER
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Abstract
Arrangement for controlling micromechanical actuators, including a digital-to-analog converter and a plurality of micromechanical actuators; wherein the micromechanical actuators are coupled to a connecting structure; wherein the digital-to-analog converter is configured to provide a voltage to be applied to the connecting structure by an adjustable capacitive voltage division that is dependent on a digital input value of the digital-to-analog converter, wherein the digital-to-analog converter is configured to directly include a capacitance of the connecting structure in the capacitive voltage division.
Claims22
Arrangement for controlling micromechanical actuators, comprising the following features:
- a digital-to-analog converter;
- and
- a plurality of micromechanical actuators;
- wherein
- the micromechanical actuators are coupled to a connecting structure;
- wherein
- the digital-to-analog converter is configured to provide a voltage to be applied to the connecting structure by an adjustable capacitive voltage division that is dependent on a digital input value of the digital-to-analog converter, wherein
- the digital-to-analog converter is configured to directly incorporate a capacitance of the connecting structure into the capacitive voltage division.
Method of controlling micromechanical actuators in an arrangement comprising a plurality of micromechanical actuators coupled to a connecting structure, wherein
- a voltage present at the connecting structure is determined by an adjustable capacitive voltage division that is dependent on a digital input value, and wherein
- a capacitance of the connecting structure is directly incorporated into the capacitive voltage division.
A non-transitory digital storage medium having a computer program stored thereon to perform the method of controlling micromechanical actuators in an arrangement comprising a plurality of micromechanical actuators coupled to a connecting structure, wherein:
- a voltage present at the connecting structure is determined by an adjustable capacitive voltage division that is dependent on a digital input value, and wherein
- a capacitance of the connecting structure is directly incorporated into the capacitive voltage division,
- when said computer program is run by a computer.
Dependencies are inferred from the claim text.