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US 2021/0197315 A1Published application
Processing apparatus, and manufacturing method of movable body
AssigneeNikon Corporation
InventorsMasayuki SHIRAISHI, Yosuke TATSUZAKI
Life of this patent
Estimating the term…
Abstract
A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a partition member that surrounds a space including an optical path between the surface of the object and an optical member that is disposed at the most object side in an optical system of the light irradiation apparatus that allows the processing light to pass therethrough.
Claims27
A processing apparatus comprising:
- a light irradiation apparatus that irradiates a surface of an object with a processing light;
- and
- a partition member that surrounds a space including an optical path between the surface of the object and an optical member that is disposed at the most object side in an optical system of the light irradiation apparatus that allows the processing light to pass therethrough.
-138. (canceled)
Dependencies are inferred from the claim text.