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US 2021/0197312 A1Published application
Processing apparatus, processing system, and manufacturing method of movable body
AssigneeNikon Corporation
InventorsMasayuki SHIRAISHI, Shigeki EGAMI, Yoshio KAWABE, Yosuke TATSUZAKI, Baku OGASAWARA
Life of this patent
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Abstract
A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
Claims30
1-27. (canceled)
A processing apparatus comprising:
- a light irradiation apparatus that irradiates a surface of an object with a processing light;
- and
- a measurement apparatus that measures a position of the light irradiation apparatus relative to the object.
A processing apparatus comprising:
- a light irradiation apparatus that irradiates a surface of an object with a processing light;
- and
- a control apparatus that controls the light irradiation apparatus by using information relating to a position of the light irradiation apparatus relative to the object.
Dependencies are inferred from the claim text.