US 2021/0197310 A1 · LASER PROCESSING APPARATUS

Abstract

A laser processing apparatus includes a laser beam applying unit, an imaging unit, and a processing section. The processing unit includes a histogram generating section and a determining section. The histogram generating section generates, from an image obtained by the imaging unit imaging a plurality of processing marks formed by applying the laser beam from the laser beam applying unit to a one-surface side of the workpiece, a first histogram including a plurality of first positions along a first direction of the image and brightness at each of the first positions and a second histogram including a plurality of second positions along a second direction orthogonal to the first direction and brightness at each of the second positions. The determining section determines a boundary of each region where one of the processing marks is formed, based on the first histogram and the second histogram generated by the histogram generating section.

Claims6

Dependent claims

A laser processing apparatus comprising:

a laser beam applying unit that applies a laser beam having such a wavelength as to be absorbed by a workpiece to thereby process the workpiece;
an imaging unit for imaging the workpiece;
and
a processing section that processes an image obtained by imaging the workpiece by the imaging unit,
wherein the processing section includes
a histogram generating section that generates, from an image obtained by the imaging unit imaging a plurality of processing marks formed by applying the laser beam from the laser beam applying unit to a one-surface side of the workpiece, a first histogram including a plurality of first positions along a first direction of the image and brightness at each of the first positions and a second histogram including a plurality of second positions along a second direction orthogonal to the first direction and brightness at each of the second positions, and
a determining section that determines a boundary of each region where one of the plurality of processing marks is formed, based on the first histogram and the second histogram generated by the histogram generating section.

4 more elements

A method for applying a laser beam to a one-surface side of a workpiece by use of a laser processing apparatus to thereby form a plurality of processing marks and then confirming each region where one of the plurality of processing marks is formed, the method comprising:

a processing mark forming step of applying a laser beam having such a wavelength as to be absorbed by the workpiece to the workpiece to thereby form the plurality of processing marks on the one-surface side of the workpiece;
an imaging step of imaging the plurality of processing marks formed in the processing mark forming step to obtain an image;
a histogram generating step of, by a processing section of the laser processing apparatus, generating a first histogram including a plurality of first positions along a first direction of the image and brightness at each of the first positions and a second histogram including a plurality of second positions along a second direction orthogonal to the first direction and brightness at each of the second positions;
and
a determining step of, by the processing section, determining a boundary of each region where one of the plurality of processing marks is formed, based on the first histogram and the second histogram generated in the histogram generating step.

2 more elements

Dependencies are inferred from the claim text.

Laser processing apparatus

Life of this patent

Laser processing apparatus

Life of this patent

Abstract

Claims6