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US 2021/0197236 A1Published application
Air curtain apparatus and an airflow accelerator for an air curtain apparatus
AssigneeTemple Technology Ltd.
InventorsWang Ming, HsiangTsung Yeh Wang
Life of this patent
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Abstract
This invention provides an air curtain apparatus, which are characterized by making the dry and clean airflow and/or de-electrostatic ionized airflow sprayed by the air-spraying heads or air-spraying slit thereof be further accelerated by a funnel structure and flowed vertically toward to a predetermined target, thereby less dry and clean airflow and/or a de-electrostatic ionized airflow are needed to achieve an idea dry and clean and/or de-electrostatic state, and the cost for cleaning or removing static electricity can be highly reduced.
Claims14
An air curtain apparatus for spraying a dry and clean airflow and/or a de-electrostatic ionized airflow toward a target, comprising:
- an article with a first surface, a second surface, a third surface and a fourth surface adjacent to each other, and a first side surface and a second side surface on opposite end terminals of the article, wherein the first surface faces to the target, the first surface faces to the third surface, the second surface faces to the fourth surface, and the first side surface is adjacent to edges of the first surface, the second surface, the third surface and the fourth surface, and the second side surface is adjacent to another edges of the first surface, the second surface, the third surface and the fourth surface;
- an air inlet, formed on the first side surface or the second side surface of the article;
- a plurality of air-spraying heads formed on the first surface of the article;
- and
- an accelerator, comprising:
- a first conductive thin film, floatingly formed on the second surface adjacent to the first surface, wherein a first distance d1 that the first conductive thin film protruding out of the first surface is greater than a second distance d2 that the air-spraying heads protruding out of the first surface;
- and
- a second conductive thin film, floatingly formed on the fourth surface adjacent to the first surface, wherein a first distance d1 that the second conductive thin film protruding out of the first surface is greater than a second distance d2 that the air-spraying heads protruding out of the first surface;
- wherein, the first conductive thin film and the second conductive thin film protruding out of the first surface form a funnel structure owing to the gravity, which contributes to the dry and clean airflow and/or the de-electrostatic ionized airflow sprayed by the air-spraying heads be accelerated by the funnel structure and flowed vertically toward to the target.
6 more elements
An air curtain apparatus for spraying a dry and clean airflow and/or a de-electrostatic ionized airflow toward a target, comprising:
- an article with a first surface, a second surface, a third surface and a fourth surface adjacent to each other, and a first side surface and a second side surface on opposite end terminals of the article, wherein the first surface faces to the target, the first surface faces to the third surface, the second surface faces to the fourth surface, and the first side surface is adjacent to edges of the first surface, the second surface, the third surface and the fourth surface, and the second side surface is adjacent to another edges of the first surface, the second surface, the third surface and the fourth surface;
- an air inlet, formed on the first side surface or the second side surface of the article;
- an air-spraying slit formed on the first surface of the article;
- and
- an accelerator, comprising:
- a first conductive thin film, floatingly formed on the second surface adjacent to the first surface, wherein a first distance d1 that the first conductive thin film protruding out of the first surface is greater than a second distance d2 that the air-spraying slit protruding out of the first surface;
- and
- a second conductive thin film, floatingly formed on the fourth surface adjacent to the first surface, wherein a first distance d1 that the second conductive thin film protruding out of the first surface is greater than a second distance d2 that the air-spraying slit protruding out of the first surface;
- wherein, the first conductive thin film and the second conductive thin film protruding out of the first surface form a funnel structure owing to the gravity, which contributes to the dry and clean airflow and/or the de-electrostatic ionized airflow sprayed by the air-spraying slit be accelerated by the funnel structure and flowed vertically toward to the target.
6 more elements
An airflow accelerator for an air curtain apparatus, comprising:
- a base part, upwardly extending along with a first direction D1;
- a terminal part;
- and
- a connecting part for connecting the base part and the terminal part, extending along with a second direction D2, and an acute angle a is formed between the first direction D1 and the second direction D2;
- wherein when the airflow accelerator for an air curtain apparatus is placed adjacent to a semiconductor equipment or a semiconductor processing room, a first gap g1 between the terminal part of the airflow accelerator for an air curtain apparatus and the semiconductor equipment or the semiconductor processing room is greater than a second gap g2 between the base part of the airflow accelerator for an air curtain apparatus and the semiconductor equipment or the semiconductor processing room, and an airflow with a first velocity of V1 sprayed by the air curtain apparatus will be accelerated by the airflow accelerator to generate an airflow with a second velocity of V2 when passing from the first gap g1 between the terminal part of the airflow accelerator for an air curtain apparatus and the semiconductor equipment or the semiconductor processing room 50 through the second gap g2 between the terminal part of the airflow accelerator for an air curtain apparatus and the semiconductor equipment or the semiconductor processing room.
2 more elements
Dependencies are inferred from the claim text.