Fluid Delivery System

A fluid delivery system comprising:

• a substrate block comprising:
• an upper surface;
• a first substrate port in the upper surface;
• a second substrate port in the upper surface and;
• a substrate fluid passageway extending between the first substrate port and the second substrate port;
• an active component selected from the group consisting of a flow controller, a pressure transducer, a flow measurement sensor, a pressure regulator, a valve, and a flow meter, the active component comprising:
• a lower surface;
• a first component port in the lower surface;
• and
• a component fluid passageway extending from the first component port;
• a seal ring having an outer ring;
• the active component mounted to the substrate block so that:
• (1) the second substrate port and the first component port are aligned and a horizontal interface is formed between the upper surface and the lower surface;
• (2) the seal ring surrounds each of the second substrate port and the first component port and fluidly seals the substrate fluid passageway and the component fluid passageway, the seal ring sized so that the outer ring of the seal ring is horizontally compressed and under no vertical interference.

A method of processing semiconductors with a fluid delivery system, the method comprising:

• a) fluidly coupling a component inlet port in a lower surface of an active component to an outlet substrate port in an upper surface of a first substrate block to form a first fluid connection, the first substrate block comprising a first inlet substrate port and a first substrate fluid passageway extending between the first inlet substrate port and the first outlet substrate port;
• and
• b) fluidly coupling a component outlet port in the lower surface of the active component to a second inlet substrate port in an upper surface of a second substrate block to form a second fluid connection, the second substrate block comprising a second outlet substrate port and a second substrate fluid passageway extending between the second inlet substrate port and the second outlet substrate port, the active component comprising a component fluid passageway extending from the component inlet port to the component outlet port, thereby forming the fluid delivery system;
• and
• c) flowing a fluid through the fluid delivery system to process the semiconductors;
• and
• wherein the first fluid connection comprises a first seal ring nesting in each of a substrate seal channel in the upper surface of the first substrate block and a component seal channel in the lower surface of the active component, the seal ring fluidly sealing the first substrate fluid passageway and the component fluid passageway.