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AssigneeBruker Nano, Inc.
InventorsWolfgang Dobler, Danilo Nitsche, Frederik Büchau-Vender
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The invention relates to a measuring device for a scanning probe microscope that comprises the following: a sample receptacle which is configured to receive a measurement sample to be examined; a measuring probe which is arranged on a probe holder and has a probe tip with which the measurement sample can be measured; a displacement device which is configured to move the measuring probe and the sample receptacle relative to each other, in order to measure the measurement sample, such that the measuring probe, in order to measure the measurement sample, executes a raster movement relative to said measurement sample in at least one spatial direction; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device that is configured to detect movement measurement signals for an actual movement of the measuring probe and/or of the sample receptacle that is executed during the relative movement between the measuring probe and the sample receptacle in order to measure the measurement sample, and to relay the movement measurement signals to the control device, the movement measurement signals indicating a first movement component in a first spatial direction that disrupts the raster movement and a second movement component in a second spatial direction that disrupts the raster movement, which second spatial direction extends transversely to the first spatial direction. The control device is configured to control the relative movement between the measuring probe and the sample receptacle in such a way that the displacement device is acted upon by the control device with compensating control signal components which cause a first countermovement which substantially compensates for the first disruptive movement component in the first spatial direction, and/or cause a second countermovement which substantially compensates for the second disruptive movement component in the second spatial direction. Furthermore, a scanning probe microscope comprising the measuring device and a method for scanning probe microscopic examination of a measurement sample by means of a scanning probe microscope are provided.
A measuring device for a scanning probe microscope, comprising
The measuring device according to at least one of the preceding claims, characterized in that the movement measurement signals include position measurement signals for the first movement component in the first spatial direction that disrupts the raster movement and position measurement signals for the second movement component in the second spatial direction that disrupts the raster movement.
The measuring device according to at least one of the preceding claims, characterized in that the control device and the displacement device are configured to execute the raster movement of the measuring probe relative to the measurement sample as a periodic movement in the at least one spatial direction during the measurement of the measurement sample.
The measuring device according to at least one of the preceding claims, characterized in that the sensor device is configured, when measuring the measurement sample, to detect, as a function of time, first movement measurement signals for a movement of the measuring probe or sample receptacle which is moved to execute the relative movement between the measuring probe and the sample receptacle.
The measuring device according to at least one of the preceding claims, characterized in that the sensor device is configured, when measuring the measurement sample, to detect, as a function of time, second movement measurement signals for a movement of the sample receptacle or measuring probe which is not moved by means of the displacement device to execute the relative movement between the measuring probe and the sample receptacle.
The measuring device according to at least one of the preceding claims, characterized in that the sensor device has a capacitive sensor device.
The measuring device according to at least one of the preceding claims, characterized in that the sensor device is at least in part formed on at least one of the following device components:
The measuring device according to at least one of the preceding claims, characterized in that the measuring probe is formed with a cantilever.
The measuring device according to at least one of the preceding claims, characterized in that the control device and the displacement device are configured to execute the raster movement of the measuring probe relative to the measurement sample with an oscillation frequency of at least approximately 100 Hz during the measurement of the measurement sample.
The measuring device according to at least one of the preceding claims, characterized in that a further sensor device is provided, which is configured to detect further movement signals in the context of a relative movement.
A scanning probe microscope for scanning probe microscopic examination of a measurement sample, comprising a measuring device according to at least one of the preceding claims.
A method for scanning probe microscopic examination of a measurement sample by means of a scanning probe microscope, comprising the steps of
Dependencies are inferred from the claim text.