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US 2021/0189559 A1Published application
Process and device for providing vapor
AssigneeSingulus Technologies AG
InventorsOliver Hohn, Michael Reising, Johannes Grübler, Kurt Pietsch, Jörg Koch
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Abstract
The present invention is directed to a method and an apparatus for providing vapor for a discontinuous process.
Claims21
A method for providing vapor for a discontinuous process, the method comprising:
- evaporating a liquid in a direct evaporator for generating a vapor;
- transporting the vapor from the direct evaporator to a process region via a storage volume, wherein the temperature of the storage device is closed loop controllable;
- wherein the fluid connection between the storage volume and the process region is interrupted if no vapor is required in the process region, and wherein vapor continues to be generated and transported into the storage volume at least temporarily during the interruption so that the pressure within the storage volume increases during the interruption.
A method for filling a process region with vapor from a direct evaporator that is connected with the process region via a storage volume and a fluid connection, wherein the method comprises:
- evaporating a liquid in the direct evaporator for generating a vapor while the fluid connection between the storage volume and the process region is interrupted until a predetermined filling condition is met;
- restoring the fluid connection between the storage volume and the process region;
- and
- filling the process region with vapor.
1 more element
An apparatus for providing vapor for a discontinuous process, the apparatus comprising:
- a direct evaporator for generating vapor;
- a storage volume in fluid connection with the direct evaporator;
- a temperature closed loop control by means of which the temperature of the storage may be closed loop controlled;
- a conduit by means of which the storage volume may be connected with a process region, wherein the conduit comprises a valve;
- and a control unit which is suitable and configured for controlling the direct evaporator and the valve such that:
- the valve is open and the generated vapor is transported from the direct evaporator to the process region via the storage volume if no vapor is required in the process region,
- the valve is closed if no vapor is required in the process region, and
- vapor continues to be generated at least temporarily during the interruption so that the pressure within the storage volume increases during the interruption.
5 more elements
Dependencies are inferred from the claim text.