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US 2021/0172057 A1Published application
Joined Body of Target Material and Backing Plate, and Method for Producing Joined Body of Target Material and Backing Plate
AssigneeJX Nippon Mining & Metals Corporation
InventorsKotaro Nagatsu, Yuki Yamada
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Abstract
Provided is a joined body of a target material and a backing plate, the joined body comprising: a target material containing Ta; and a backing plate joined to the target material, wherein a tensile strength between the target material and the backing plate is 20 kg/mm2 or more, and the target material has an average hydrogen content of 7 ppm by volume or less.
Claims7
A joined body of a target material and a backing plate, the joined body comprising:
- a target material containing Ta;
- and
- a backing plate joined to the target material, wherein a tensile strength between the target material and the backing plate is 20 kg/mm2 or more, and the target material has an average hydrogen content of 7 ppm by volume or less.
A method for producing a joined body of a target material and a backing plate, the method comprising the steps of:
- preparing each of a target material containing Ta and a backing plate;
- and
- joining the target material to the backing plate by overlapping the target material and the backing plate with each other and pressing them while heating them in an inert gas atmosphere,
- wherein in the step of joining the target material to the backing plate, a hydrogen concentration in the inert gas atmosphere is 5 ppm by volume or less, and the target material and the backing plate overlapped with each other are heated at a temperature of from 600° C. to 800° C.
1 more element
Dependencies are inferred from the claim text.