# US 2021/0172052 A1 · Vapor deposition apparatus and method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2021/0172052 A1 - Document ID: US20210172052A1 - Status: Published application - Kind: A1 - Application number: 17/176,436 - Filed: 2021-02-16 - Published: 2021-06-10 - Earliest claimed: 2016-07-06 - Assignees: Raytheon Technologies Corporation - Applicants: Raytheon Technologies Corporation - Inventors: Erik M. Nielsen; Peter F. Gero - Web page: https://patentgrep.com/patent/US20210172052A1 ## CPC - C23C 14/26: by resistance or inductive heating of the source - C23C 14/24: Vacuum evaporation - C23C 14/243: {Crucibles for source material (C23C14/28, C23C14/30 take precedence)} - C23C 14/246: {Replenishment of source material} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract A vapor deposition apparatus includes a chamber configured to operate at vacuum and at least one crucible in the chamber. The crucible is configured to receive an ingot, a feeder operable to move the ingot with respect to the at least one crucible, and a heater in the chamber and configured to heat a hot zone between the at least one crucible and the feeder. A method for vapor deposition is also disclosed. ## Claims ### Claim 1 A vapor deposition apparatus, comprising: a chamber configured to operate at vacuum; at least one crucible in the chamber, the at least one crucible configured to receive an ingot; a feeder operable to move the ingot with respect to the at least one crucible; and a heater in the chamber and configured to heat a hot zone between the at least one crucible and the feeder. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the feeder includes a drive mechanism and a mechanical guide mechanism or guide rods. ### Claim 3 (depends on 2) The apparatus of claim 2, wherein the heater is between the mechanical guide mechanism or guide rods and the crucible. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the heater is fixed to the crucible. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein the heater is an induction heater. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein the heater is a microwave heater. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein the heater is a resistance heater. ### Claim 8 (depends on 1) The apparatus of claim 1, wherein the heater is selected from a group consisting of an induction heater, a microwave heater, and a resistance heater. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein the heater circumscribes the hot zone. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein the heater is operable to heat the hot zone above the vaporization temperature of water across a typical range of thermal emission physical vapor deposition (TE-PVD) process pressures. ### Claim 11 (depends on 1) The apparatus of claim 1, further comprising heat shields defining the hot zone. ### Claim 12 A method for vapor deposition, comprising: driving off moisture from an ingot in a vapor deposition chamber prior to the ingot entering a crucible; and providing the ingot to the crucible for vapor deposition. ### Claim 13 (depends on 12) The method of claim 12, further comprising feeding the ingot through a hot zone and into the crucible. ### Claim 14 (depends on 13) The method of claim 13, wherein the hot zone is defined between an ingot feeder and the crucible. ### Claim 15 (depends on 13) The method of claim 13, wherein the moisture is driven off as the ingot is fed through the hot zone. ### Claim 16 (depends on 13) The method of claim 13, wherein heat is retained by providing heat shields. ### Claim 17 (depends on 13) The method of claim 13, further comprising heating the hot zone with a heater that is in the chamber. ### Claim 18 (depends on 17) The method of claim 17, wherein the heater is selected from a group consisting of an induction heater, a microwave heater, and a resistance heater. ### Claim 19 (depends on 18) The method of claim 18, wherein the ingot is heated to a temperature above the vaporization temperature of water. ### Claim 20 (depends on 17) The method of claim 17, wherein the heater circumscribes the ingot.