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US 2021/0165058 A1Published application
Stacked structure, magnetoresistive effect element, magnetic head, sensor, high frequency filter, and oscillator
AssigneeTDK Corporation
InventorsKazuumi INUBUSHI, Katsuyuki NAKADA
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Abstract
A stacked structure is positioned on a nonmagnetic metal layer. The stacked structure includes a ferromagnetic layer and an intermediate layer interposed between the nonmagnetic metal layer and the ferromagnetic layer. The intermediate layer includes a NiAlX alloy layer represented by Formula (1): Niγ1Alγ2Xγ3 . . . (1), [X indicates one or more elements selected from the group consisting of Si, Sc, Ti, Cr, Mn, Fe, Co, Cu, Zr, Nb, and Ta, and satisfies an expression of 0<γ<0.5 in a case of γ=γ3/(γ1+γ2+γ3)].
Claims14
A magnetoresistive effect element comprising:
- a first ferromagnetic layer;
- a second ferromagnetic layer;
- and
- a nonmagnetic spacer layer that is disposed between the first ferromagnetic layer and the second ferromagnetic layer,
- wherein the nonmagnetic spacer layer includes:
- a nonmagnetic metal layer, and
- at least one of a first intermediate layer provided under the nonmagnetic metal layer and a second intermediate layer provided over the nonmagnetic metal layer, and
- wherein the first intermediate layer and the second intermediate layer include an NiAlX alloy that is expressed by General Formula (1):
- Niγ1Alγ2Xγ3 (1)
- wherein
- X indicates one element selected from the group consisting of Si, Sc, Ti, Cr, Mn, Fe, Co, Cu, Zr, Nb, and Ta, and
- 0<γ<0.5 in a case of γ=γ3/(γ1+γ2+γ3).
9 more elements
Dependencies are inferred from the claim text.