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US 2021/0154722 A1Published application
Method for bending hydroformed cooling devices and bent hydroformed cooling devices
OwnerFatih Kara, Joerg Zeutschelinventors
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Abstract
A method for bending a cooling device for microlithographic projection exposure apparatuses includes: providing an unbent cooling device that includes a cavity; filling the cavity with a liquid cryogenic medium at least in a region of the cooling device that is to be bent; cooling the cooling device such that the medium present in the cavity cools below its melting temperature and thereby at least partially solidifies; and bending the cooling device such that the at least partially solidified medium prevents the cavity from closing during bending.
Claims20
A method, comprising:
- a) disposing a liquid cryogenic medium in a cavity of a cooling device;
- b) after a), cooling the cooling device to at least partially solidify the cryogenic medium present in the cavity;
- and
- c) after b), bending the cooling device so that the at least partially solidified cryogenic medium prevents the cavity from closing during bending.
1 more element
An apparatus, comprising:
- an illumination device comprising a plurality of optical elements;
- a projection lens comprising a second plurality of optical elements;
- and
- a cooling device comprising a first sheet and a second sheet different from the first sheet,
- wherein:
- the illumination device is configured to illuminate an object in an object plane of the projection lens;
- the projection lens is configured to image the illuminated object onto a light-sensitive material in an image plane of the projection lens;
- the cooling device comprises a cavity between the first and second sheets;
- the cavity has a bending radius of less than approximately 100 millimeters;
- and
- the cooling device is configured to cool at least one optical element selected from the group consisting of the first plurality of optical elements and the second plurality of optical elements.
8 more elements
Dependencies are inferred from the claim text.