Fluidic device and system
AssigneeNikon Corporation
InventorsRyo KOBAYASHI, Naoya ISHIZAWA, Taro UENO, Kohma HAYASHI
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AssigneeNikon Corporation
InventorsRyo KOBAYASHI, Naoya ISHIZAWA, Taro UENO, Kohma HAYASHI
Estimating the term…
A fluidic device that can feed a fluid along a flow path without causing a leakage of gas is provided. The fluidic device includes: a first substrate and a second substrate which are bonded to each other at a bonding surface and at least one of which includes a flow path that is open on the bonding surface; and three or more valve portions that are disposed at a position facing the flow path and that are configured to adjust a flow of a fluid in the flow path by deformation. The first substrate includes a through-hole penetrating the first substrate at positions facing the valve portions. The valve portions are disposed on the same circumference centered on an axis extending in a normal direction of the bonding surface.
A fluidic device comprising:
Dependencies are inferred from the claim text.