Improvements in and relating to coating processes
AssigneesGencoa Ltd., Nano4Energy Slne
InventorsVictor BELLIDO-GONZALEZ, Iván FERNÁNDEZ, Ambiörn WENNBERG, Dermot Partick MONAGHAN
Life of this patent
Estimating the term…
Loading patent…
AssigneesGencoa Ltd., Nano4Energy Slne
InventorsVictor BELLIDO-GONZALEZ, Iván FERNÁNDEZ, Ambiörn WENNBERG, Dermot Partick MONAGHAN
Estimating the term…
An apparatus (1b) and method of depleting a plasma of electrons in a plasma coating apparatus is disclosed. The invention involves generating a plasma comprising ions (9), particulate material (5) and electrons (6) adjacent a target (4); forming a plasma trap (52) to constrain the plasma near to the target (4), and depleting the plasma of electrons by: providing an additional magnetic field (8b) that is superimposed over the magnetic field of the plasma trap (3, 52), which extends beyond a boundary layer (52) of the plasma trap, and which draws electrons (6) from, or near to, the boundary layer (52) of the plasma trap away from the target (4). The invention proposes applying a baseline voltage (50) to the target (4); and by applying periodic voltage pulses (13b) to the target (4). The additional magnetic field (8b) depletes the plasma of electrons, such that when a voltage pulse (13b) is applied to the target (4), ions (9) can be ejected from the plasma with reduced electron shielding. This has been shown to improve ion bombardment and reduce adverse electron bombardment effects.
A plasma coating apparatus comprising:
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
A method of depleting a plasma in a plasma coating apparatus of electrons, the plasma coating apparatus comprising apparatus comprising a target, the method comprising the steps of:
(canceled)
(canceled)
(canceled)
A system comprising:
Dependencies are inferred from the claim text.