US 2021/0131885 A1Published application

Pressure sensor

AssigneeVibration Measurement Solutions, Inc.

InventorGeorge V. Zusman

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Abstract

A piezoelectric pressure sensor is characterized by a piezoelectric transducer having substantially parallel piezoelectric plate faces oriented in planes that extend substantially parallel a principal longitudinal axis of the sensor, a pair of clamping members engaging the piezoelectric plate faces, a membrane cap covering the clamping members and mounted on a stem to define an enclosed protective chamber that isolates the piezoelectric transducer and the clamping members from an environment outside the membrane cap. The membrane cap has a membrane wall engaging outside faces of the clamping members. The membrane wall undergoes inward deflections in response to pressure increases in the environment outside the membrane cap. The clamping members undergo corresponding inward deflections in response to the inward deflections of the membrane wall. The inward deflections of the clamping members act on the piezoelectric plate faces, resulting in deformations of the piezoelectric transducer that produce corresponding electrical signals.

Claims18

Dependent claims

A piezoelectric pressure sensor, comprising:

a piezoelectric transducer having substantially parallel piezoelectric plate faces oriented in planes that are substantially parallel to a principal longitudinal axis of said pressure sensor, said piezoelectric transducer having primary sensitivity to pressure forces directed substantially perpendicular to said principal longitudinal axis, and being comparatively insensitive to forces directed substantially parallel to said principal longitudinal axis;
a pair of clamping members engaging said piezoelectric plate faces;
a membrane cap covering said clamping members;
said membrane cap being mounted on a stem to define an enclosed protective chamber that isolates said piezoelectric transducer and said clamping members from an environment outside of said membrane cap;
said membrane cap having a membrane wall engaging outside faces of said clamping members;
said membrane wall undergoing inward deflections in response to pressure increases in said environment outside said membrane cap;
said clamping members undergoing corresponding inward deflections in response to said inward deflections of said membrane wall;
said inward deflections of said clamping members acting on said piezoelectric plate faces, resulting in deformations of said piezoelectric transducer that produce corresponding electrical signals;
said membrane cap comprising a base end that seats on a shoulder formed on said stem;
said base end of said membrane cap being bonded to said stem;
and
said clamping members being part of a fork on said stem that extends from said shoulder of said stem.

9 more elements

A piezoelectric pressure sensor, comprising:

a stem having a fork section, a medial section and a base section arranged along a principal longitudinal axis of said pressure sensor;
said fork section comprising a pair of fork members that define a slot centered on said principal longitudinal axis;
a piezoelectric transducer disposed in said slot of said fork section, said transducer having piezoelectric plate faces engaging inside faces of said fork members, said piezoelectric plate faces being oriented in planes that extend substantially parallel to said principal longitudinal axis, said piezoelectric transducer having primary sensitivity to pressure forces directed substantially perpendicular to said principal longitudinal axis, and being comparatively insensitive to forces directed substantially parallel to said principal longitudinal axis;
a membrane cap mounted on said medial section, said membrane cap covering said fork section and enclosing said piezoelectric transducer in a protective chamber that is isolated from an environment outside of said membrane cap;
said membrane cap comprising a metallic material having a lower coefficient of thermal expansion than a metallic material that comprises said stem;
said membrane cap having a membrane wall engaging outside faces of said fork members;
said membrane wall undergoing inward deflections in response to pressure increases in said environment outside said membrane cap;
said fork members undergoing corresponding inward deflections in response to said inward deflections of said membrane wall;
said inward deflections of said fork members acting on said piezoelectric plate faces, resulting in deformations of said transducer that produce corresponding electrical signals;
said piezoelectric transducer comprising a pair of piezoelectric elements separated by an electrode plate;
said piezoelectric elements each having inside and outside piezoelectric plate faces, said inside piezoelectric plate faces engaging said electrode plate and providing a first electrical pole of said piezoelectric transducer, and said outside piezoelectric plate faces engaging inside faces of said fork members and providing a second electrical pole of said piezoelectric transducer;
said electrode plate being in electrical communication with an electrical conductor that extends through a bore in said base section of said stem and provides a first electrical pathway to said first electrical pole of said piezoelectric transducer;
said electrode plate covering the entire area of said inside piezoelectric plate faces, and including a protruding electrode terminal to which said electrical conductor is attached;
said stem comprising electrically conductive material that is in electrical communication with said outside piezoelectric plate faces via said inside faces of said fork members, such that said stem provides a second electrical pathway to said second electrical pole of said piezoelectric transducer;
said membrane cap comprising a substantially dome-shaped free end and a substantially non-tapered base end;
said base end of said membrane cap being seated on and bonded to said stem;
said fork section comprising outside faces that are laterally recessed adjacent to a shoulder of said stem to provide a pocket that facilitates bonding of said base end of said membrane cap to said stem;
said slot of said fork section being defined by inside faces of said clamping members and having a laterally enlarged slot pocket at a base end thereof to facilitate bonding of said piezoelectric transducer to said fork section;
said stem comprising a base end configured for connection to a pressure sensor holder;
and
said piezoelectric elements having either no shear sensitivity, or having shear sensitivity but which are arranged to compensate for said shear sensitivity.

18 more elements

Dependencies are inferred from the claim text.