System for a semiconductor fabrication facility and method for operating the same

A method for operating a system for a semiconductor fabrication facility, comprising:

• providing a manufacturing tool comprising a load port, a maintenance crane, an OHT vehicle, and a control unit;
• defining a danger zone overlapping the load port of the manufacturing tool;
• detecting a location of the maintenance crane by at least a first sensor and generating a first location data of the maintenance crane;
• detecting a location of the OHT vehicle by a second sensor and generating a second location data of the OHT vehicle;
• and
• switching, by the control unit, between a first mode when the second location data overlaps with the danger zone and a second mode when the first location data overlaps with the danger zone.

A system for a semiconductor fabrication facility, comprising:

• a manufacturing tool comprising a load port;
• a maintenance crane;
• a rectangular zone overlapping with the load port of the manufacturing tool;
• a plurality of first sensors at corners of the rectangular zone, wherein the first sensors are configured to detect a location of the maintenance crane and generate a first location data;
• an OHT vehicle;
• a second sensor on the OHT vehicle configured to generate a second location data;
• a third sensor on the load port;
• and
• a control unit configured to receive the first location data of the maintenance crane and the second location data of the OHT vehicle, and send signals to the second sensor and the third sensor or to cut off the signal to the second sensor.