Polymers and photoresist compositions
OwnerYang SONG, Jong Keun PARK +5inventors
InventorsYang SONG, Jong Keun PARK, Emad AQAD, Mingqi LI, Colin LIU, James W. THACKERAY, Peter TREFONAS, III
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OwnerYang SONG, Jong Keun PARK +5inventors
InventorsYang SONG, Jong Keun PARK, Emad AQAD, Mingqi LI, Colin LIU, James W. THACKERAY, Peter TREFONAS, III
Estimating the term…
A polymer comprising: a first repeating unit comprising a tertiary ester acid labile group; and a second repeating unit of Formula (1): wherein R1 to R5 are as provided herein; R2 and R3 together do not form a ring; each A is independently a halogen, a carboxylic acid or ester, a thiol, a straight chain or branched C1-20 alkyl, a monocyclic or polycyclic C3-20 cycloalkyl, a monocyclic or polycyclic C3-20 fluorocycloalkenyl, a monocyclic or polycyclic C3-20 heterocycloalkyl, a monocyclic or polycyclic C6-20 aryl, or a monocyclic or polycyclic C4-20 heteroaryl, each of which is substituted or unsubstituted; and m is an integer of 0 to 4.
A polymer comprising:
Dependencies are inferred from the claim text.