# US 2021/0082986 A1 · Light detector, light detection system, lidar device, and vehicle

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- Number: US 2021/0082986 A1
- Document ID: US20210082986A1
- Status: Published application
- Kind: A1
- Application number: 16/815,987
- Filed: 2020-03-11
- Published: 2021-03-18
- Earliest claimed: 2019-09-18
- Assignees: Kabushiki Kaisha Toshiba
- Applicants: Kabushiki Kaisha Toshiba
- Inventors: Honam KWON; lkuo FUJIWARA; Keita SASAKI; Kazuhiro SUZUKI
- Web page: https://patentgrep.com/patent/US20210082986A1

## CPC

- H10D 1/47: Resistors having no potential barriers
- G01S 17/931: of land vehicles
- H10F 30/225: the potential barrier working in avalanche mode, e.g. avalanche photodiodes
- H10F 39/107: {having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays}
- H10F 39/18: Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F 39/811: {Interconnections}
- H10F 77/959: {for devices working in avalanche mode}
- H10D 1/474: {comprising refractory metals, transition metals, noble metals, metal compounds or metal alloys, e.g. silicides}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

According to one embodiment, a light detector includes an element and a quenching resistance. The element includes a photodiode. The quenching resistance is electrically connected to the element. The quenching resistance includes a semiconductor member and a plurality of first metal members. The plurality of first metal members is electrically connected to the semiconductor member and separated from each other.

## Claims

### Claim 1

A light detector, comprising:
an element including a photodiode; and
a quenching resistance electrically connected to the element, the quenching resistance including a semiconductor member and a plurality of first metal members, the plurality of first metal members being electrically connected to the semiconductor member and separated from each other.

### Claim 2 (depends on 1)

The detector according to claim 1, further comprising a perimeter region surrounding the element in a first direction,
at least a portion of the quenching resistance being arranged with the perimeter region in a second direction crossing the first direction.

### Claim 3 (depends on 2)

The detector according to claim 2, wherein
the perimeter region includes:
a semiconductor region surrounding the element in the first direction, the semiconductor region being of a first conductivity type; and
an insulating part provided between the semiconductor region and the quenching resistance in the second direction.

### Claim 4 (depends on 2)

The detector according to claim 2, wherein
the element includes a first semiconductor region of a first conductivity type, a second semiconductor region of a second conductivity type, and a third semiconductor region of the first conductivity type, the third semiconductor region being provided between the first semiconductor region and the second semiconductor region in the second direction, and
the perimeter region includes an insulating part surrounding the first semiconductor region, the second semiconductor region, and the third semiconductor region in the first direction.

### Claim 5 (depends on 2)

The detector according to claim 2, wherein the semiconductor member is arranged with the plurality of first metal members in the second direction.

### Claim 6 (depends on 5)

The detector according to claim 5, wherein
each of the plurality of first metal members includes:
a first wiring part separated from the semiconductor member in the second direction; and
a first connection part and a second connection part, the first connection part and the second connection part electrically connecting the semiconductor member and the first wiring part, being provided between the semiconductor member and the first wiring part, and being separated from each other.

### Claim 7 (depends on 6)

The detector according to claim 6, wherein
the quenching resistance further includes a plurality of second metal members electrically connected to the semiconductor member,
the plurality of second metal members is separated from each other,
each of the plurality of second metal members includes:
a second wiring part separated from the semiconductor member in the second direction; and
a third connection part and a fourth connection part, the third connection part and the fourth connection part electrically connecting the semiconductor member and the second wiring part, being provided between the semiconductor member and the second wiring part, and being separated from each other, and
the second wiring part extends in a direction different from an extension direction of the first wiring part.

### Claim 8 (depends on 7)

The detector according to claim 7, wherein
a portion of the semiconductor member extends in the first direction, and
for the first metal member and the second metal member electrically connected to the portion of the semiconductor member, at least a portion of the first wiring part of the first metal member is arranged with the second wiring part of the second metal member in a third direction, the third direction crossing a plane including the first direction and the second direction.

### Claim 9 (depends on 5)

The detector according to claim 5, further comprising an insulating layer arranged with the semiconductor member in the second direction,
the plurality of first metal members each being surrounded with the insulating layer in the first direction.

### Claim 10 (depends on 1)

The detector according to claim 1, further comprising wiring electrically connected to the quenching resistance,
the plurality of first metal members each being connected to the semiconductor member in parallel between the element and the wiring.

### Claim 11 (depends on 1)

The detector according to claim 1, wherein
the quenching resistance includes a plurality of the semiconductor members, and
the plurality of semiconductor members and the plurality of first metal members are connected in series.

### Claim 12 (depends on 11)

The detector according to claim 11, wherein the plurality of semiconductor members and the plurality of first metal members are connected in series alternately.

### Claim 13

A light detector, comprising:
an element including a photodiode; and
a quenching resistance electrically connected to the element, the quenching resistance including a first metal member and a plurality of semiconductor members, the plurality of semiconductor members being electrically connected to the first metal member and separated from each other.

### Claim 14 (depends on 1)

The detector according to claim 1, wherein the photodiode is an avalanche photodiode operating in a Geiger mode.

### Claim 15 (depends on 1)

The detector according to claim 1, wherein
the element includes a first semiconductor region of a first conductivity type, a second semiconductor region of a second conductivity type, and a third semiconductor region of the first conductivity type, the third semiconductor region being provided between the first semiconductor region and the second semiconductor region,
a p-n junction is formed by the second semiconductor region and the third semiconductor region, and
the quenching resistance is electrically connected to the second semiconductor region.

### Claim 16 (depends on 1)

A light detection system, comprising:
the light detector according to claim 1; and
a distance measuring circuit calculating, from an output signal of the light detector, a time-of-flight of light.

### Claim 17 (depends on 16)

A lidar device, comprising:
a light source irradiating light on an object; and
the light detection system according to claim 16 detecting light reflected by the object.

### Claim 18 (depends on 17)

The lidar device according to claim 17, further comprising an image recognition system generating a three-dimensional image based on an arrangement relationship of the light source and the light detector.

### Claim 19 (depends on 17)

A vehicle, comprising the lidar device according to claim 17.

### Claim 20 (depends on 17)

A vehicle, comprising the lidar devices according to claim 17 at four corners of a vehicle body.