Imprint apparatus and method of controlling imprint apparatus
AssigneeCanon Kabushiki Kaisha
InventorsHisashi Namba, Noriyasu Hasegawa, Yoshimasa Araki, Keita Sakai
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Abstract
An imprint apparatus includes: a movable housing unit; an ejection head provided in the housing unit and configured to eject an ejection material; a flexible member provided in the housing unit and separating the housing unit into a first storing space communicating with the ejection head and storing the ejection material and a second storing space storing hydraulic liquid; a first channel and a second channel communicating with the second storing space; a pressure control unit configured to control a pressure in the second storing space through the channels; and a bubble detection unit configured to detect bubbles in the channels.
Claims16
An imprint apparatus, including:
- a movable housing unit;
- an ejection head provided in the housing unit and configured to eject an ejection material;
- a flexible member provided in the housing unit and separating the housing unit into a first storing space communicating with the ejection head and storing the ejection material and a second storing space storing hydraulic liquid;
- a channel communicating with the second storing space;
- and
- a pressure control unit configured to control a pressure in the second storing space through the channel, wherein the imprint apparatus comprising:
- a detection unit configured to detect bubbles in the channel.
A method of controlling an imprint apparatus including
- a movable housing unit,
- an ejection head provided in the housing unit and configured to eject an ejection material,
- a flexible member provided in the housing unit and separating the housing unit into a first storing space communicating with the ejection head and storing the ejection material and a second storing space storing hydraulic liquid,
- a channel communicating with the second storing space, and
- a pressure control unit configured to control a pressure in the second storing space through the channel, comprising:
- detecting bubbles in the channel.
Dependencies are inferred from the claim text.