Measuring apparatus

Abstract

A measuring apparatus for measuring positional relation between a chuck table for holding a workpiece thereon and a processing tool for processing the workpiece held on the chuck table. The measuring apparatus includes a broadband light source, a mirror for reflecting light emitted from the broadband light source to travel toward the processing tool, a chromatic aberration condensing lens disposed between the broadband light source and the mirror or between the mirror and the processing tool, a light branching unit branching reflected light from the processing tool that has been reflected by the mirror and traveled back through the chromatic aberration condensing lens, and a position detecting unit detecting the position of the processing tool on the basis of intensity of the reflected light that corresponds to a wavelength of the reflected light branched by the light branching unit.

Dependencies are inferred from the claim text.