Microfluidic devices and methods for manufacturing microfluidic devices
AssigneeCorning Incorporated
InventorsYe Fang, Jin Su Kim, Aize Li
Life of this patent
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Abstract
A method for manufacturing a microfluidic device (100) includes depositing a bonding layer (106) on a surface of a second glass layer (104a) of a glass substrate having a first glass layer (102) and the second glass layer (104a) fused to the first glass layer (102), such that a masked region of the surface is covered by the bonding layer, and an exposed region of the surface is uncovered by the bonding layer; removing a portion of the second glass layer corresponding to the exposed region of the surface to form a flow channel (112) in the glass substrate; and bonding a cover (108) to the glass substrate with the bonding layer (106).
Claims28
A microfluidic device comprising:
- a glass-based substrate comprising a first glass-based layer and a second glass-based layer fused to the first glass-based layer;
- a flow channel disposed in the glass-based substrate;
- and
- a cover bonded to the glass-based substrate and at least partially covering the flow channel;
- wherein at least one of a floor or a ceiling of the flow channel has an average surface flatness of at most about 100 nm/mm, measured in a longitudinal direction at a central portion of the flow channel.
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A microfluidic device comprising:
- a glass-based substrate;
- a flow channel disposed in the glass-based substrate;
- and
- a cover bonded to the glass-based substrate and at least partially covering the flow channel,
- wherein at least one of a floor or a ceiling of the flow channel has an average surface flatness of at most about 100 nm/mm, measured in a longitudinal direction at a central portion of the flow channel.
A method for manufacturing a microfluidic device, the method comprising:
- depositing a bonding layer on a surface of a second glass-based layer of a glass-based substrate comprising a first glass-based layer and the second glass-based layer fused to the first glass-based layer, whereby a masked region of the surface is covered by the bonding layer, and an exposed region of the surface is uncovered by the bonding layer;
- removing a portion of the second glass-based layer corresponding to the exposed region of the surface to form a flow channel in the glass-based substrate;
- and
- bonding a cover to the glass-based substrate with the bonding layer.
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Dependencies are inferred from the claim text.