Suppression of transverse mode spurious signals in surface acoustic wave devices utilizing a gap hammer structure
AssigneeSkyworks Solutions, Inc.
InventorsJoji Fujiwara, Riho Sasaki
Life of this patent
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Abstract
An acoustic wave device comprises a substrate including a piezoelectric material, and interdigital transducer (IDT) electrodes disposed on a surface of the substrate. The IDT electrodes have gap regions, edge regions, and center regions. A maximum width of the IDT electrodes in the gap regions is greater than the maximum width of the IDT electrodes in the edge regions, thereby achieving a velocity of an acoustic wave in the gap regions being greater than the velocity of the acoustic wave in the center regions, and the velocity of the acoustic wave in the center regions being greater than the velocity of the acoustic wave in the edge regions.
Claims20
An acoustic wave device comprising:
- a substrate including a piezoelectric material;
- and
- interdigital transducer (IDT) electrodes disposed on a surface of the substrate, the IDT electrodes having gap regions, edge regions, and center regions, a maximum width of the IDT electrodes in the gap regions being greater than the maximum width of the IDT electrodes in the edge regions to cause a velocity of an acoustic wave in the gap regions to be greater than the velocity of the acoustic wave in the center regions, and the velocity of the acoustic wave in the center regions to be greater than the velocity of the acoustic wave in the edge regions.
A radio frequency filter comprising:
- at least one acoustic wave device, the at least one acoustic wave device including:
- a substrate including a piezoelectric material;
- and
- interdigital transducer (IDT) electrodes disposed on a surface of the substrate, the IDT electrodes having gap regions, edge regions, and center regions, a velocity of an acoustic wave in the gap regions being greater than the velocity of the acoustic wave in the center regions, the velocity of the acoustic wave in the center regions being greater than the velocity of the acoustic wave in the edge regions.
An electronics module comprising:
- at least one radio frequency filter including at least one acoustic wave device, the at least one acoustic wave device including:
- a substrate including a piezoelectric material;
- and
- interdigital transducer (IDT) electrodes disposed on a surface of the substrate, the IDT electrodes having gap regions, edge regions, and center regions, a velocity of an acoustic wave in the gap regions being greater than the velocity of the acoustic wave in the center regions, the velocity of the acoustic wave in the center regions being greater than the velocity of the acoustic wave in the edge regions.
Dependencies are inferred from the claim text.