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US 2021/0067129 A1Published application
Joined body of piezoelectric material substrate and support substrate
AssigneeNGK Insulators, Ltd.
InventorsYuji HORI, Tatsuro TAKAGAKI
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Abstract
A bonded body includes a supporting substrate; a piezoelectric material substrate composed of a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate; and a bonding layer bonding the supporting substrate and the piezoelectric material substrate and contacting a main surface of the piezoelectric material substrate. The bonding layer includes a void extending from the piezoelectric material substrate to the supporting substrate.
Claims12
A bonded body comprising:
- a supporting substrate;
- a piezoelectric material substrate comprising a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate;
- and
- a bonding layer bonding said supporting substrate and said piezoelectric material substrate and contacting a main surface of said piezoelectric material substrate,
- wherein said bonding layer comprises a void extending from said piezoelectric material substrate toward said supporting substrate, and
- wherein a recess is provided on said main surface of said piezoelectric material substrate and said void is communicated with said recess.
3 more elements
A bonded body comprising:
- a supporting substrate;
- a piezoelectric material substrate comprising a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate;
- and
- a bonding layer bonding said supporting substrate and said piezoelectric material substrate and contacting a main surface of said piezoelectric material substrate,
- wherein said bonding layer comprises a void extending from said piezoelectric material substrate toward said supporting substrate, and
- wherein said bonding layer comprises a material selected from the group consisting of silicon oxide and tantalum pentoxide.
3 more elements
A bonded body comprising:
- a supporting substrate;
- a piezoelectric material substrate comprising a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate;
- and
- a bonding layer bonding said supporting substrate and said piezoelectric material substrate and contacting a main surface of said piezoelectric material substrate,
- wherein said bonding layer comprises a void extending from said piezoelectric material substrate toward said supporting substrate, and
- wherein said bonded body further comprises an intermediate layer between said bonding layer and said supporting substrate.
3 more elements
Dependencies are inferred from the claim text.