US 2021/0066449 A1 · POROUS REGION STRUCTURE AND METHOD OF MANUFACTURE THEREOF

Abstract

A porous region structure and a method of fabrication thereof are disclosed. The porous region structure is characterized by having a hard mask interface region with non-uniform pores sealed and thereby excluded functionally from the structure. The sealing of the hard mask interface region is done using a hard mask deposited on top of an anodization hard mask used to define the porous region of the structure. By excluding the hard mask interface region, the porosity ratio and the equivalent specific surface of the porous region structure can be controlled or quantified with higher accuracy. Corrosion due to exposure of an underlying metal layer of the structure is also significantly reduced by sealing the hard mask interface region.

Claims16

Dependent claims

A porous region structure, comprising:

a substrate;
a first metal layer above the substrate;
a porous region constituted by an anodized section of the first metal layer, the porous region comprising an anodic oxide having a plurality of pores that extend from a top surface of the porous region toward the substrate;
and
a hard mask above the first metal layer and the porous region, the hard mask having an opening above a defined area of the porous region configured so that the hard mask covers lateral pores of the plurality of pores of the porous region.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

17/095,202Filed 11 Nov 2020

Priority

EP 18305582.111 May 2018

Published

4 Mar 2021

Term ends

Not estimatedThe source records don’t support an estimate.

Classification14 codes

H10D 1/043
Of capacitors having no potential barriers: using patterning processes to form electrode extensions, e.g. etching
C25D 11/022
Anodisation: anodisation on selected surface areas
C25D 11/18
Of aluminium or alloys based thereon: after-treatment, e.g. pore-sealing
H10D 1/712
Having non-planar surfaces, e.g. formed by texturisation: being rough surfaces, e.g. using hemispherical grains

Porous region structure and method of manufacture thereof

Life of this patent

Porous region structure and method of manufacture thereof

Life of this patent

Abstract

Claims16