Semiconductor fabrication system and method

A method of manufacturing a semiconductor electronic device, comprising:

• forming an assembly comprising a first jig portion, a second jig portion, and a boat supporting a die arranged between the first jig portion and the second jig portion;
• with a first robot, forming a locked assembly by manipulating a locking system to urge the first jig portion toward the second jig portion and fix an alignment of the boat relative to the first jig portion and the second jig portion;
• subjecting the locked assembly to a fabrication operation within a process chamber;
• with the first robot, forming an unlocked assembly by releasing the locking system after completion of the fabrication operation;
• and
• separating the boat from the unlocked assembly.

A non-transitory computer-readable medium storing instructions that, when executed by a processor of a computer-implemented control system, cause the computer-implemented control system to:

• retrieve, with a first robot, a jig from a jig carrier storing an inventory of available jigs, wherein the jig comprises a first jig portion and a second jig portion;
• deliver the jig to an assembler;
• introduce, with an entry load port, a boat supporting a die to the assembler;
• arrange, with the assembler, the boat between the first jig portion and the second jig portion to form an assembly;
• transport the assembly with a first conveyor to a second robot;
• manipulate, with the second robot, a locking system of the assembly to form a locked assembly by urging the first jig portion toward the second jig portion and exerting a compressive force on the boat;
• deliver, with the first robot, the locked assembly to a processing chamber in which the locked assembly is to be subjected to a fabrication operation;
• with the first robot, return the locked assembly to the second robot after completion of the fabrication operation;
• release the locking system with the second robot to form an unlocked assembly;
• transport the unlocked assembly to the assembler;
• separate the boat from the unlocked assembly with the assembler;
• and
• deliver, with a second conveyor, the boat to an exit port.