Substrate work system
AssigneeFuji Corporation
InventorHiroyuki AO
Life of this patent
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AssigneeFuji Corporation
InventorHiroyuki AO
Estimating the term…
A substrate work system including a work device configured to perform predetermined work on a substrate by use of an exchangeable work unit includes a storage section configured to store the work unit, a maintenance device configured to perform maintenance of the work unit, a conveyance device capable of conveying the work unit, a determination section configured to determine a maintenance time for the work unit used in the work device based on quality information on work quality of the predetermined work, and a control section configured to, when the determination section determines that a maintenance time arrives, cause the conveyance device, the work device, and the maintenance device to unload the work unit, convey the work unit to the work device to exchange with the work unit that has been used, and convey the used-up work unit to the maintenance device.
A substrate work system including a work device configured to perform predetermined work on a substrate by use of an exchangeable work unit, the substrate work system comprising:
A substrate work system comprising a work device configured to perform predetermined work on a substrate by use of an exchangeable work unit, the substrate work system comprising:
Dependencies are inferred from the claim text.