Measurement Method of Ultrasonic Wave Using Capacitive Micromachined Ultrasonic Transducer
AssigneeHitachi, Ltd.
InventorsTaiichi TAKEZAKI, Shuntaro MACHIDA
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Abstract
Disclosed is a measurement method of ultrasonic waves using a capacitive micromachined ultrasonic transducer. The method includes measuring a ultrasonic wave by applying a bias voltage to the capacitive micromachined ultrasonic transducer in each of a plurality of first periods, and applying a voltage that is equal to or greater than 0V and smaller than the bias voltage to the capacitive micromachined ultrasonic transducer in a second period between two first periods among the plurality of first periods.
Claims10
A measurement method of an ultrasonic wave using a capacitive micromachined ultrasonic transducer, comprising:
- measuring an ultrasonic wave by applying a bias voltage to the capacitive micromachined ultrasonic transducer in each of a plurality of first periods;
- and
- applying a voltage that is equal to or greater than 0V and smaller than the bias voltage to the capacitive micromachined ultrasonic transducer in a second period that occurs between two first periods among the plurality of first periods.
A ultrasonic imaging apparatus, comprising:
- an ultrasonic probe including a plurality of capacitive micromachined ultrasonic transducers;
- and
- a controller that controls the ultrasonic probe,
- wherein the controller is configured to:
- measure an ultrasonic wave by applying a bias voltage to the capacitive micromachined ultrasonic transducers in each of a plurality of first periods, and generate an image of a target;
- and
- applying a voltage that is equal to or greater than 0V and smaller than the bias voltage to the capacitive micromachined ultrasonic transducers in a second period that occurs between two first periods among the plurality of first periods.
Dependencies are inferred from the claim text.