Fluid composition and method for conducting a material removing operation
AssigneeSaint-Gobain Ceramics & Plastics, Inc.
InventorsLin FU, Jason A. Sherlock, Long Huy Buil, Douglas E. Ward
Life of this patent
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Abstract
A fluid composition suitable for chemical mechanical polishing a substrate can in include a multi-valent metal borate, at least one oxidizer, and a solvent. The fluid composition can be essentially free of abrasive particles and may achieve a high material removal rate and excellent surface finish.
Claims20
A fluid composition comprising:
- a multi-valent metal borate;
- at least one oxidizing agent;
- and a solvent.
A method of polishing a substrate, comprising:
- providing a fluid composition, wherein the fluid composition comprises a multi-valent metal borate, at least one oxidizing agent and water;
- bringing the fluid composition in contact with the substrate and a polishing pad;
- and
- polishing the substrate.
A kit adapted to preparing a fluid for polishing a substrate, the kit comprising a first package and a second package, wherein the first package comprises a multi-valent metal salt, and the second package comprises boric acid.
Dependencies are inferred from the claim text.