Lanthanoid compound, lanthanoid-containing thin film and formation of lanthanoid-containing thin film using the lanthanoid compound
AssigneeL'Air Liquide Société Anonyme pour I'Explotion des Procédés Georges Claude
InventorsChristian DUSSARRAT, Takashi ONO, Tomohiro SEKI
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Abstract
The lanthanoid compound according to the present invention is a compound represented by the following general formula Ln(R1xCp)2(A)y or the following general formula Sm(R2xCp)2(A)y. In Ln(R1xCp)2(A)y, Ln is Nd, Eu, Dy, Tm, or Yb, R1 is independently Me, Et, nPr, iPr, nBt, sBu, iBu, or tAm, Cp is cyclopentadienyl, A is a linear or cyclic hydrocarbon containing oxygen, sulfur, phosphorus, or nitrogen, x is an integer of 2 to 3, and y is 0 to 2. In Sm(R2xCp)2(A)y, R2 is independently nPr, iPr, nBt, sBu, iBu, or tAm.
Claims14
A lanthanoid compound represented by the following general formula (1)
- Ln(R1xCp)2(A)y (1)
- wherein:
- Ln is Nd, Eu, Dy, Tm, or Yb;
- R1 is independently methyl, ethyl, normal propyl, isopropyl, normal butyl, secondary butyl, isobutyl, or tertiary amyl;
- Cp is cyclopentadienyl;
- A is a linear or cyclic hydrocarbon containing oxygen, sulfur, phosphorus, or nitrogen;
- x is an integer of 2 to 3;
- and
- y is 0 to 2.
A lanthanoid compound represented by the following general formula (2)
- Sm(R2xCp)2(A)y (2)
- wherein:
- R2 is independently normal propyl, isopropyl, normal butyl, secondary butyl, isobutyl, or tertiary amyl;
- Cp is cyclopentadienyl;
- A is a linear or cyclic hydrocarbon containing oxygen, sulfur, phosphorus, or nitrogen;
- x is an integer of 2 to 3;
- and
- y is 0 to 2.
-7. (canceled)
A method for forming a lanthanoid-containing thin film, comprising:
- a substrate introducing step for introducing a substrate into a chamber;
- a lanthanoid compound introducing step for introducing a lanthanoid compound represented by the following general formula (1) or the following general formula (2) into the chamber in which the substrate was arranged;
- and
- a film-forming step for forming at least some of the lanthanoid compound on the substrate so as to form the lanthanoid-containing thin film,
- wherein the general formula (1) is
- Ln(R1xCp)2(A)y and
- wherein:
- Ln is Nd, Eu, Dy, Tm, or Yb;
- R1 is independently methyl, ethyl, normal propyl, isopropyl, normal butyl, secondary butyl, isobutyl, or tertiary amyl;
- Cp is cyclopentadienyl;
- A is a linear or cyclic hydrocarbon containing oxygen, sulfur, phosphorus, or nitrogen;
- x is an integer of 2 to 3;
- and
- y is 0 to 2.
- wherein the general formula (2) is
- Sm(R2xCp)2(A)y and
- wherein:
- R2 is independently normal propyl, isopropyl, normal butyl, secondary butyl, isobutyl, or tertiary amyl;
- Cp is cyclopentadienyl;
- A is a linear or cyclic hydrocarbon containing oxygen, sulfur, phosphorus, or nitrogen;
- x is an integer of 2 to 3;
- and
- y is 0 to 2.
Dependencies are inferred from the claim text.