Microparticle production method and microparticle production apparatus

An apparatus for producing fine particles, the apparatus comprising:

• a feedstock supply section configured to intermittently supply feedstock for fine particle production into a thermal plasma flame;
• a plasma torch in which the thermal plasma flame is generated, the plasma torch being configured to evaporate, by use of the thermal plasma flame, the feedstock supplied by the feedstock supply section and thereby convert the feedstock to a mixture in a gas phase state;
• a plasma generation section configured to generate the thermal plasma flame inside the plasma torch;
• and
• a gas supply section configured to supply gas into the plasma torch,
• wherein the plasma generation section generates, as the thermal plasma flame, a modulated induction thermal plasma flame whose temperature state is time-modulated, and periodically switches the modulated induction thermal plasma flame between a high temperature state and a low temperature state having a lower temperature than the high temperature state,
• wherein the feedstock is, together with carrier gas, supplied into the plasma torch by the feedstock supply section while the modulated induction thermal plasma flame is in the high temperature state, and
• wherein supply of the feedstock by the feedstock supply section is suspended and the gas whose type is same as the carrier gas is supplied into the plasma torch by the gas supply section while the modulated induction thermal plasma flame is in the low temperature state.