Nanogap sensors and methods of forming the same

A device comprising:

• a substrate having conducting lines thereon;
• one or more fin structures arranged over the substrate;
• wherein each of the one or more fin structures comprises:
• a sensor arranged around the fin structure over the substrate, wherein the sensor comprises a self-aligned first sensing electrode and a self-aligned second sensing electrode arranged around the fin structure, wherein the first sensing electrode and the second sensing electrode define a vertical sensing cavity of the sensor around the fin structure, and the first sensing electrode and the second sensing electrode are electrically coupled to the conducting lines.

A method of forming a device, comprising:

• providing a substrate having conducting lines thereon;
• arranging one or more fin structures over the substrate;
• arranging a sensor over the substrate and around each fin structure of the one or more fin structures, wherein arranging the sensor comprises forming a self-aligned first sensing electrode and a second sensing electrode around the one or more fin structures;
• and
• wherein the first sensing electrode and the second sensing electrode each comprises a first portion lining a sidewall of the fin structure and a second portion arranged laterally from the first portion, wherein at least the first portion of the first sensing electrode and the first portion of the second sensing electrode define a sensing cavity of the sensor, and the second portion of the first sensing electrode and the second portion of the second sensing electrode are electrically coupled to the conducting lines.