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US 2021/0010956 A1Published application
Electron microscopy analysis method
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsNicolas BERNIER, Loïc HENRY
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Abstract
The present disclosure concerns an electron microscopy method, including the emission of a precessing electron beam and the acquisition, at least partly simultaneous, of an electron diffraction pattern and of intensity values of X rays.
Claims14
An electron microscopy method, comprising the emission of an electron beam having a precessional motion and the acquisition, at least partly simultaneous, of an electron diffraction pattern and of intensity values of X rays.
Dependencies are inferred from the claim text.