Differential pressure sensor for determining a differential pressure value

A differential pressure sensor for determining a differential pressure value, the sensor comprising:

• a differential pressure transducer including a measuring membrane and a circuit configured to convert a pressure-dependent deformation of the measuring membrane into a differential pressure value;
• a membrane seal comprising:
• a membrane seal body including a pressure chamber, which is filled with a transfer fluid, and a filling body including a recess in which the differential pressure transducer is disposed, wherein the filling body is adapted to fill cavities between walls of the pressure chamber and the differential pressure transducer,
• wherein a first hydraulic path and a second hydraulic path each extend through the membrane seal body between first openings and second openings of the first hydraulic path and the second hydraulic path, respectively,
• wherein the first openings are each covered with first separating membranes, respectively, which are configured to have a first pressure or a second pressure applied thereto, in operation, as to introduce the first pressure into the first hydraulic path and the second pressure into the second hydraulic path,
• wherein the first hydraulic path opens at its respective second opening into the pressure chamber such that the first pressure is applied to the measuring membrane of the differential pressure transducer on a first measuring membrane side, and
• wherein the second pressure is applied to a second measuring membrane side of the measuring membrane via the respective second opening of the second hydraulic path such that the pressure-dependent deformation of the measuring membrane represents the differential pressure value between the first pressure and the second pressure;
• and
• a piezoelectric layer disposed within the pressure chamber and configured to determine an absolute pressure value of the first pressure.