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US 2021/0010887 A1Published application
Pressure sensor
AssigneeMurata Manufacturing Co., Ltd.
InventorsRyohei HAMAZAKI, Daiki TSUJI
Life of this patent
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Abstract
A pressure sensor includes a base, a membrane disposed at a distance from the base, a first fixed electrode provided on the base so as to be opposite to the membrane and including a dielectric layer, and a second fixed electrode provided on the base so as to be opposite to the membrane. When pressure that acts on the membrane increases to cause the membrane to sag toward the base, the membrane comes in contact with the dielectric layer of the first fixed electrode before a distance between the membrane and the second fixed electrode becomes constant.
Claims15
A pressure sensor comprising:
- a base;
- a membrane disposed at a distance from the base;
- a first fixed electrode provided on the base so as to be opposite to the membrane and including a dielectric layer;
- and
- a second fixed electrode provided on the base so as to be opposite to the membrane;
- wherein
- when pressure that acts on the membrane increases to cause the membrane to sag toward the base, the membrane comes in contact with the dielectric layer of the first fixed electrode before a distance between the membrane and the second fixed electrode becomes constant.
4 more elements
Dependencies are inferred from the claim text.