Capacitive Pressure Sensor, Manufacturing Method Thereof, and Capacitive Pressure Sensor Device

A capacitive pressure sensor comprising:

• a plurality of flexible substrates;
• a plurality electrodes, wherein a first electrode and a second electrode are disposed on one surface of each of the flexible substrates and are spaced apart from each other and located to face each other when the flexible substrates are folded and wherein the first electrodes are electrically connected together and the second electrodes are electrically connected together, and the first electrodes and second electrodes are connected in parallel to each other;
• a plurality of dielectric layers, each dielectric layer interposed between a respective first electrode and a respective second electrode;
• and
• a signal processing unit disposed on one surface of one of the plurality of flexible substrates and electrically connected to the first and second electrodes, the signal processing unit configured to convert a capacitance, which changes as a thickness of the dielectric layer changes by external pressure in a state in which the plurality of flexible substrates are folded, into an electrical signal.

A manufacturing method of a capacitive pressure sensor, the manufacturing method comprising:

• attaching a first electrode and a second electrode onto one surface of a flexible substrate so as to be spaced apart from each other;
• attaching a signal processing unit on one surface of the flexible substrate;
• locating a dielectric layer over the first electrode or the second electrode;
• and
• folding the flexible substrate so that the first electrode and the second electrode face each other with the dielectric layer being disposed therebetween.