Pressure sensor
AssigneeFuji Electric Co., Ltd.
InventorKazuhiro MATSUNAMI
Life of this patent
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Abstract
If the bridge circuit fails due to damage of the diaphragm, the damage is detected at an early stage. A pressure sensor comprises: a substrate provided with a diaphragm; a bridge circuit having four resistor devices provided at the diaphragm, the bridge circuit being applied with high-voltage-side voltage and low-voltage-side voltage, and having two output terminals; a detecting unit for detecting a first output at a first output terminal and a second output at a second output terminal, each output terminal being of the bridge circuit; and a failure detecting unit for detecting failure of the bridge circuit based on a detection result at the detecting unit.
Claims11
A pressure sensor, comprising:
- a substrate provided with a diaphragm;
- a bridge circuit having four resistor devices provided at the diaphragm, the bridge circuit being applied with high-voltage-side voltage and low-voltage-side voltage, and having two output terminals;
- a detecting unit for detecting a first output at a first output terminal and a second output at a second output terminal, each output terminal being of the bridge circuit;
- and
- a failure detecting unit for detecting failure of the bridge circuit based on a detection result by the detecting unit.
Dependencies are inferred from the claim text.