Sealing equipment
AssigneeSinfonia Technology Co., Ltd.
InventorsToshihiro Kawai, Gengoro Ogura
Life of this patent
Estimating the term…
Abstract
A housing is made sealable even when the rigidity of a frame member and a cover member is not high. In an EFEM, a pressure difference having a predetermined value or less exists between an internal space of a housing and an external space of the housing. The housing includes a frame member assembled so as to form an opening, a cover member attached to the frame member so as to cover the opening, and a seal member sandwiched between the frame member and the cover member and configured to extend so as to surround the opening. The frame member and the cover member are formed of a sheet metal. The seal member is an elastic member having a hollow cross section orthogonal to an extension direction of the seal member.
Claims12
A sealing equipment in which a pressure difference having a predetermined value or less exists between an internal space of a housing and an external space of the housing, the housing comprising:
- a frame member assembled so as to form an opening;
- a cover member attached to the frame member so as to cover the opening;
- and
- a seal member sandwiched between the frame member and the cover member and configured to extend so as to surround the opening,
- wherein the frame member and the cover member are formed of a sheet metal, and
- wherein the seal member is an elastic member having a hollow cross section orthogonal to an extension direction of the seal member.
(canceled)
A sealing equipment in which a pressure difference of 3000 Pa or less exists between an internal space of a housing and an external space of the housing, the housing comprising:
- a frame member assembled so as to form an opening;
- a cover member attached to the frame member so as to cover the opening;
- and
- a seal member sandwiched between the frame member and the cover member and configured to extend so as to surround the opening,
- wherein at least one of the frame member and the cover member is formed of a sheet metal having a thickness of 6 mm or less,
- wherein the frame member and the cover member include contact surfaces that make contact with the seal member and have a flatness of 0.5 mm/m to 5 mm/m, and
- wherein the seal member is an elastic member having a hollow cross section orthogonal to an extension direction of the seal member.
Dependencies are inferred from the claim text.