Enclosed cavity structures
AssigneeX-Celeprint Limited
InventorsRonald S. Cok, Raja Fazan Gul, António José Marques Trindade
Life of this patent
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Abstract
An example of a cavity structure comprises a cavity substrate comprising a substrate surface, a cavity extending into the cavity substrate, the cavity having a cavity bottom and cavity walls, and a cap disposed on a side of the cavity opposite the cavity bottom. The cavity substrate, the cap, and the one or more cavity walls form a cavity enclosing a volume. A component can be disposed in the cavity and can extend above the substrate surface. The component can be a piezoelectric or a MEMS device. The cap can have a tophat configuration. The cavity structure can be micro-transfer printed from a source wafer to a destination substrate.
Claims70
A cavity structure, comprising:
- a cavity substrate comprising a substrate surface;
- a cavity extending into the cavity substrate away from the substrate surface, the cavity having one or more cavity walls;
- and
- a cap disposed on or over the cavity substrate, wherein (i) the cap is disposed on the substrate surface, or (ii) the cap is disposed on a structure disposed on the substrate surface,
- wherein the cavity substrate, the cap, and the one or more cavity walls form at least a portion of an enclosed cavity that encloses a volume.
The cavity structure of any one of the preceding claims, wherein (i) the cap is disposed on the substrate surface.
A cavity structure, comprising:
- a cavity substrate defining one or more cavity walls of a cavity and in part enclosing sides of a volume;
- a component disposed in the enclosed cavity and physically connected to the one or more cavity walls such that the component is suspended within the enclosed cavity;
- and
- at least a portion of a structure tether physically connected to the cavity substrate or a layer disposed on the cavity substrate.
A cavity structure, comprising:
- a substrate comprising a substrate surface;
- and
- a cap disposed on the substrate surface, the cap comprising (i) one or more flat cap contact portions in contact with the substrate, (ii) one or more cap wall portions extending away from the one or more cap contact portions and away from the substrate surface, and (iii) a cap top portion connected to the one or more cap wall portions, the cap enclosing a volume between the cap and the substrate.
A cavity structure, comprising:
- a cavity substrate comprising a substrate surface;
- a cavity extending into the cavity substrate away from the substrate surface, the cavity having one or more cavity walls;
- a cap disposed over the cavity substrate;
- and
- a destination substrate,
- wherein the cavity substrate is disposed on the destination substrate and the cap is disposed on the destination substrate or a layer disposed on the destination substrate, and
- wherein the destination substrate, the cavity substrate, the cap, and the one or more cavity walls form at least a portion of an enclosed cavity that encloses a volume.
Dependencies are inferred from the claim text.