Heating apparatus, heating method, and substrate processing apparatus

A heating apparatus for heating a heating target object, comprising:

• a heating member configured to support the heating target object and made of an electromagnetic wave absorber;
• an electromagnetic wave irradiation part configured to irradiate an electromagnetic wave to an irradiation surface of the heating member positioned opposite to a surface supporting the heating target object;
• and
• a controller,
• wherein the electromagnetic wave irradiation part comprises:
• an electromagnetic wave output part configured to output the electromagnetic wave;
• and
• an antenna unit constituting a phased array antenna,
• the antenna unit further comprises:
• a plurality of antenna modules each having an antenna configured to radiate the electromagnetic wave and a phase shifter configured to adjust a phase of the electromagnetic wave radiated from the antenna, and
• the controller is configured to control the phase shifters of the plurality of antenna modules so that phases of electromagnetic waves radiated from a plurality of the antenna are condensed on an arbitrary portion of the heating member by interference, and a condensed portion of the electromagnetic waves is scanned on the irradiation surface of the heating member.