# US 2020/0401654 A1 · Processing system and processing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2020/0401654 A1 - Document ID: US20200401654A1 - Status: Published application - Kind: A1 - Application number: 16/901,046 - Filed: 2020-06-15 - Published: 2020-12-24 - Earliest claimed: 2019-06-21 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Ryota AOI; Kenichi KOBAYASHI - Web page: https://patentgrep.com/patent/US20200401654A1 ## CPC - G06F 17/18: for evaluating statistical data {, e.g. average values, frequency distributions, probability functions, regression analysis (forecasting specially adapted for a specific administrative, business or logistic context G06Q10/04)} - G06T 11/26: Drawing of charts or graphs - Y02P 90/02: Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS] - G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N) - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL - Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS ## Abstract A processing system includes: a first statistical operator configured to divide data output from each sensor of a target apparatus according to each processing division of a processing performed by the target apparatus, and perform a statistical operation for each processing division; a second statistical operator configured to divide data output from each sensor of a comparative apparatus according to each processing division of the processing performed by the comparative apparatus, and perform a statistical operation for each processing division; a calculator configured to calculate a difference value between a result of the statistical operation performed by the first statistical operator and a result of the statistical operation performed by the second statistical operator, for each processing division; and a display controller configured to display the difference value for each processing division in a graph. ## Claims ### Claim 1 A processing system comprising: a first statistical operator configured to divide data output from each sensor of a target apparatus according to each processing division of a processing performed by the target apparatus, and perform a statistical operation for each processing division; a second statistical operator configured to divide data output from each sensor of a comparative apparatus according to each processing division of the processing performed by the comparative apparatus, and perform a statistical operation for each processing division; a calculator configured to calculate a difference value between a result of the statistical operation performed by the first statistical operator and a result of the statistical operation performed by the second statistical operator, for each processing division; and a display controller configured to display the difference value for each processing division in a graph. ### Claim 2 (depends on 1) The processing system according to claim 1, wherein the first statistical operator divides the data output from each sensor of the target apparatus according to an execution start timing and an execution completion timing when the target apparatus executes each processing division of the processing, and the second statistical operator divides the data output from each sensor of the comparative apparatus according to an execution start timing and an execution completion timing when the comparative apparatus executes each processing division of the processing. ### Claim 3 (depends on 2) The processing system according to claim 2, wherein the first statistical operator performs a statistical operation of any one of a minimum value, a maximum value, an average value, and a standard deviation on the data divided according to each processing division, for each processing division, and the second statistical operator performs a statistical operation of any one of a minimum value, a maximum value, an average value, and a standard deviation on the data divided according to each processing division, for each processing division. ### Claim 4 (depends on 1) The processing system according to claim 1, wherein when any one difference value is selected from the difference value displayed in the graph for each processing division, the display controller displays data divided into a corresponding processing division of a sensor that corresponds to the selected difference value, among the data output from each sensor of the target apparatus. ### Claim 5 (depends on 3) The processing system according to claim 3, wherein the display controller displays any one of a difference value calculated based on data output from a selected sensor, a difference value calculated based on data divided according to a selected processing division, and a difference value calculated based on data on which a selected statistical operation is performed, in the graph, from the difference value for each processing division. ### Claim 6 (depends on 5) The processing system according to claim 5, wherein the display controller further displays a processing time required when the target apparatus executes each processing division of the processing, in the graph for each processing division. ### Claim 7 (depends on 6) The processing system according to claim 6, wherein the display controller further displays a time difference between the processing time required when the target apparatus executes each processing division of the processing and a processing time required when the comparative apparatus executes each processing division of the processing, in the graph for each processing division. ### Claim 8 (depends on 7) The processing system according to claim 7, wherein the target apparatus and the comparative apparatus are substrate processing apparatuses that process substrates. ### Claim 9 A processing method comprising: dividing data output from each sensor of a target apparatus according to each processing division of a processing performed by the target apparatus, and performing a statistical operation for each processing division; dividing data output from each sensor of a comparative apparatus according to each processing division of the processing performed by the comparative apparatus, and perform a statistical operation for each processing division; calculating a difference value between a result of the statistical operation in the performing a statistical operation and a result of the statistical operation in the performing a statistical operation, for each processing division; and displaying the difference value for each processing division in a graph.