# US 2020/0401172 A1 · Device design for short-circuit protection of transistors

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- Number: US 2020/0401172 A1
- Document ID: US20200401172A1
- Status: Published application
- Kind: A1
- Application number: 16/448,538
- Filed: 2019-06-21
- Published: 2020-12-24
- Earliest claimed: 2019-06-21
- Assignees: Cree, Inc.
- Applicants: Cree, Inc.
- Inventors: James Richmond; Edward Robert Van Brunt; Philipp Steinmann
- Web page: https://patentgrep.com/patent/US20200401172A1

## CPC

- G05F 1/569: for protection
- H03K 17/0828: {in composite switches}
- G01R 31/50: Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections (testing of sparking plugs H01T13/58)
- G05F 3/20: using diode- transistor combinations (G05F3/18 takes precedence)
- H03K 17/0822: {in field-effect transistor switches}
- H03K 17/74: by the use, as active elements, of diodes (by the use of more than one type of semiconductor device H03K17/567; by the use of tunnel diodes H03K17/58; by the use of negative resistance diodes H03K17/70)
- H10D 30/665: {having edge termination structures}
- H10D 62/8325: {Silicon carbide}
- G05F: SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- H03K: PULSE TECHNIQUE (measuring pulse characteristics G01R; modulating sinusoidal oscillations with pulses H03C; transmission of digital information H04L; discriminator circuits detecting phase difference between two signals by counting or integrating cycles of oscillation H03D3/04; automatic control, starting, synchronisation or stabilisation of generators of electronic oscillations or pulses where the type of generator is irrelevant or unspecified H03L; coding, decoding or code conversion, in general H03M)
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A transistor semiconductor die includes a first current terminal, a second current terminal, and a control terminal. A semiconductor structure is between the first current terminal, the second current terminal, and the control terminal and configured such that a resistance between the first current terminal and the second current terminal is based on a control signal provided at the control terminal. Short circuit protection circuitry is coupled between the control terminal and the second current terminal. In a normal mode of operation, the short circuit protection circuitry is configured to provide a voltage drop that is greater than a voltage of the control signal. In a short circuit protection mode of operation, the short circuit protection circuitry is configured to provide a voltage drop that is less than a voltage of the control signal.

## Claims

### Claim 1

A transistor semiconductor die comprising:
a first current terminal and a second current terminal;
a control terminal;
a semiconductor structure between the first current terminal, the second current terminal, and the control terminal, the semiconductor structure configured such that a resistance between the first current terminal and the second current terminal is based on a control signal provided at the control terminal; and
short circuit protection circuitry coupled between the control terminal and the second current terminal and configured to:
in a normal mode of operation, provide a voltage drop between the control terminal and the second current terminal that is greater than a voltage of the control signal; and
in a short circuit protection mode of operation, provide a voltage drop between the control terminal and the second current terminal that is less than a voltage of the control signal.

### Claim 2 (depends on 1)

The transistor semiconductor die of claim 1 wherein the short circuit protection circuitry comprises one or more diodes coupled between the control terminal and the second current terminal.

### Claim 3 (depends on 2)

The transistor semiconductor die of claim 2 wherein the one or more diodes are provided by a plurality of implanted regions in the semiconductor structure.

### Claim 4 (depends on 2)

The transistor semiconductor die of claim 2 wherein the one or more diodes are provided by an additional semiconductor layer on the semiconductor structure.

### Claim 5 (depends on 2)

The transistor semiconductor die of claim 2 further comprising a resistive element coupled between the short circuit protection circuitry and the control terminal.

### Claim 6 (depends on 5)

The transistor semiconductor die of claim 5 wherein:
the one or more diodes have a negative temperature coefficient with respect to a voltage drop across the one or more diodes; and
the resistive element has a positive temperature coefficient with respect to a resistance thereof.

### Claim 7 (depends on 2)

The transistor semiconductor die of claim 2 wherein the one or more diodes have a negative temperature coefficient with respect to a voltage drop across the one or more diodes.

### Claim 8 (depends on 2)

The transistor semiconductor die of claim 2 wherein the one or more diodes are coupled in series such that an anode of a first one of the one or more diodes is coupled to the control terminal and a cathode of a last one of the one or more diodes is coupled to the second current terminal.

### Claim 9 (depends on 8)

The transistor semiconductor die of claim 8 wherein the one or more diodes are PN diodes.

### Claim 10 (depends on 8)

The transistor semiconductor die of claim 8 wherein the one or more diodes are Schottky diodes.

### Claim 11 (depends on 2)

The transistor semiconductor die of claim 2 wherein the one or more diodes are Zener diodes coupled in series such that a cathode of a first one of the one or more diodes is coupled to the control terminal and an anode of a last one of the one or more diodes is coupled to the second current terminal.

### Claim 12 (depends on 1)

The transistor semiconductor die of claim 1 wherein the semiconductor structure comprises silicon carbide.

### Claim 13 (depends on 12)

The transistor semiconductor die of claim 12 wherein the semiconductor structure provides a metal-oxide semiconductor field-effect transistor (MOSFET) such that the first current terminal is a drain terminal and the second current terminal is a source terminal.

### Claim 14 (depends on 12)

The transistor semiconductor die of claim 12 wherein the semiconductor structure provides an insulated gate bipolar transistor (IGBT) such that the first current terminal is a collector terminal and the second current terminal is an emitter terminal.

### Claim 15 (depends on 1)

The transistor semiconductor die of claim 1 wherein:
the transistor semiconductor die is configured to operate in the normal mode of operation when a temperature of the semiconductor structure is below a short circuit threshold temperature; and
the transistor semiconductor die is configured to operate in the short circuit protection mode of operation when a temperature of the semiconductor structure is above the short circuit threshold temperature.

### Claim 16 (depends on 1)

The transistor semiconductor die of claim 1 wherein the voltage drop between the control terminal and the second current terminal provided by the short circuit protection circuitry has a negative temperature coefficient.

### Claim 17 (depends on 1)

The transistor semiconductor die of claim 1 wherein an on-state resistance of the transistor semiconductor die is less than 3.0 mΩ/cm2, a blocking voltage of the transistor semiconductor die is greater than 600V, and a short circuit withstand time of the transistor semiconductor die is greater than 3 μs.

### Claim 18 (depends on 17)

The transistor semiconductor die of claim 17 wherein the on-state resistance of the transistor semiconductor die is greater than 0.1 mΩ/cm2, the blocking voltage of the transistor semiconductor die is less than 10 kV, and a short circuit withstand time of the transistor semiconductor die is less than 10 s.

### Claim 19

A transistor semiconductor die comprising:
a first current terminal and a second current terminal;
a control terminal; and
a semiconductor structure between the first current terminal, the second current terminal, and the control terminal, the semiconductor structure configured such that a resistance between the first current terminal and the second current terminal is based on a control signal provided at the control terminal, an on-state resistance of the transistor semiconductor die is less than 3.0 mΩ/cm2, a blocking voltage of the transistor semiconductor die is greater than 600V, and a short circuit withstand time of the transistor semiconductor die is greater than 3 μs.

### Claim 20 (depends on 19)

The transistor semiconductor die of claim 19 wherein the on-state resistance of the transistor semiconductor die is greater than 0.1 mΩ/cm2, the blocking voltage of the transistor semiconductor die is less than 10 kV, and the short circuit withstand time of the transistor semiconductor die is less than 10 s.

### Claim 21

A transistor semiconductor die comprising:
a first current terminal and a second current terminal;
a control terminal;
a semiconductor structure between the first current terminal, the second current terminal, and the control terminal, the semiconductor structure configured such that a resistance between the first current terminal and the second current terminal is based on a control signal provided at the control terminal; and
short circuit protection circuitry coupled between the control terminal and the second current terminal, the short circuit protection circuitry comprising a plurality of diodes coupled in series between the control terminal and the second current terminal.

### Claim 22 (depends on 21)

The transistor semiconductor die of claim 21 wherein the plurality of diodes are coupled in series such that an anode of a first one of the plurality of diodes is coupled to the control terminal, a cathode of a last one of the plurality of diodes is coupled to the second current terminal, and each adjacent pair of diodes in the plurality of diodes is coupled anode-to-cathode.

### Claim 23 (depends on 22)

The transistor semiconductor die of claim 22 further comprising a resistive element coupled between the cathode of the last one of the plurality of diodes and the second current terminal.

### Claim 24 (depends on 23)

The transistor semiconductor die of claim 23 wherein:
the one or more diodes have a negative temperature coefficient with respect to a voltage drop across the one or more diodes; and
the resistive element has a negative temperature coefficient with respect to a resistance thereof.

### Claim 25 (depends on 21)

The transistor semiconductor die of claim 21 wherein the plurality of diodes are coupled in series such that a cathode of a first one of the plurality of diodes is coupled to the control terminal, an anode of a last one of the plurality of diodes is coupled to the second current terminal, and each adjacent pair of diodes in the plurality of diodes is coupled anode-to-cathode.

### Claim 26 (depends on 23)

The transistor semiconductor die of claim 23 wherein the plurality of diodes are Zener diodes.

### Claim 27 (depends on 25)

The transistor semiconductor die of claim 25 further comprising a resistive element coupled between the anode of the last one of the diodes and the second current terminal.

### Claim 28 (depends on 27)

The transistor semiconductor die of claim 27 wherein:
the one or more diodes have a negative temperature coefficient with respect to a voltage drop across the one or more diodes; and
the resistive element has a positive temperature coefficient with respect to a resistance thereof.

### Claim 29 (depends on 21)

The transistor semiconductor die of claim 21 further comprising a resistive element coupled between the short circuit protection circuitry and the control terminal.

### Claim 30 (depends on 29)

The transistor semiconductor die of claim 29 wherein:
the one or more diodes have a negative temperature coefficient with respect to a voltage drop across the one or more diodes; and
the resistive element has a positive temperature coefficient with respect to a resistance thereof.
