# US 2020/0401038 A1 · Pellicle comprising graphite thin film

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2020/0401038 A1
- Document ID: US20200401038A1
- Status: Published application
- Kind: A1
- Application number: 17/012,912
- Filed: 2020-09-04
- Published: 2020-12-24
- Earliest claimed: 2018-03-09
- Assignees: Kaneka Corporation; University of Hyogo
- Applicants: Kaneka Corporation; University of Hyogo
- Inventors: Yuki Kawashima; Shuhei Ozaki; Masamitsu Tachibana; Takeo Watanabe; Tetsuo Harada
- Web page: https://patentgrep.com/patent/US20200401038A1

## CPC

- G03F 1/62: Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- C01B 32/184: Preparation
- C01B 32/205: Preparation
- G03F 1/64: characterised by the frames, e.g. structure or material, including bonding means therefor
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C}

## Abstract

The present disclosure relates to a pellicle that can achieve both a high EUV transmittance and a uniformity in EUV transmittance by including a graphite thin film having a film thickness of 5 nm or more and 30 nm or less and a surface roughness (Sa) of 0.1 nm or more and 500 nm or less.

## Claims

### Claim 1

A pellicle comprising:
a graphite thin film, wherein the graphite thin film has a surface roughness (Sa) of 0.1 nm or more and 500 nm or less,
wherein the graphite thin film has a film thickness of 5 nm or more and 30 nm or less, and
wherein the graphite thin film has a ratio (I (D)/I (G)) of a D-band intensity (I (D)) to a G-band intensity (I (G)) in a Raman spectrum of 0 or more and 0.5 or less.

### Claim 2 (depends on 1)

The pellicle according to claim 1, wherein the graphite thin film has a film thickness of 5 nm or more and 20 nm or less.

### Claim 3 (depends on 1)

The pellicle according to claim 1, wherein the graphite thin film has a density of 2.10 g/cm3 or more and 2.26 g/cm3 or less.

### Claim 4 (depends on 1)

The pellicle according to claim 1, wherein the graphite thin film has a surface roughness (Sa) of 1 nm or more and 350 nm or less.

### Claim 5 (depends on 1)

A pellicle composite comprising:
the pellicle according to claim 1; and
a frame.

### Claim 6

A method for producing a pellicle,
wherein the pellicle comprises a graphite thin film,
wherein the method comprises baking a carbonized film under tension at a temperature of 2200° C. or more to give the graphite thin film,
wherein the graphite thin film has a surface roughness (Sa) of 0.1 nm or more and 500 nm or less and a film thickness of 5 nm or more and 30 nm or less, and
wherein the graphite thin film has a ratio (I (D)/I (G)) of a D-band intensity (I (D)) to a G-band intensity (I (G)) in a Raman spectrum of 0 or more and 0.5 or less.

### Claim 7 (depends on 6)

The method for producing the pellicle according to claim 6, the method further comprising a step of carbonizing a polymer film under tension to give the carbonized film.

### Claim 8 (depends on 6)

The method for producing the pellicle according to claim 6, wherein the carbonized film is baked while sandwiched between pieces of graphite in at least a part of the baking.

### Claim 9 (depends on 7)

The method for producing the pellicle according to claim 7, wherein the polymer film is carbonized while sandwiched between pieces of graphite.