# US 2020/0393197 A1 · Heater, temperature control system, and processing apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2020/0393197 A1 - Document ID: US20200393197A1 - Status: Published application - Kind: A1 - Application number: 16/899,041 - Filed: 2020-06-11 - Published: 2020-12-17 - Earliest claimed: 2019-06-12 - Assignees: Kokusai Electric Corporation - Applicants: Kokusai Electric Corporation - Inventors: Tetsuya KOSUGI; Masaaki UENO; Shinobu SUGIURA; Masashi SUGISHITA - Web page: https://patentgrep.com/patent/US20200393197A1 ## CPC - F27B 17/0025: {specially adapted for treating semiconductor wafers} - H05B 1/0233: {for semiconductors manufacturing} - H05B 3/0019: {Circuit arrangements} - H05B 3/0047: {for semiconductor manufacture} - H10P 72/0434: {mainly by convection} - H10P 72/0602: {Temperature monitoring} - H10P 72/3312: {Vertical transfer of a batch of workpieces} - H05B 2203/035: Electrical circuits used in resistive heating apparatus - H05B 2203/037: Heaters with zones of different power density - F27B: FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract There is provided a technique that includes: a heat generator installed for each of control zones and configured to raise an internal temperature of a reaction tube by heat generation; a circuit configured to equalize resistance values in the respective control zones, wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit. ## Claims ### Claim 1 A heater divided into a plurality of control zones, the heater comprising: a heat generator installed for each of the control zones and configured to raise an internal temperature of a reaction tube by heat generation; and a circuit configured to equalize resistance values in the respective control zones, wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit. ### Claim 2 (depends on 1) The heater according to claim 1, wherein the output variable element is at least one selected from the group of a resistor, a thyristor, and an IGBT. ### Claim 3 (depends on 1) The heater according to claim 1, wherein two or more of the output circuits are arranged and wired in the plurality of control zones. ### Claim 4 (depends on 1) The heater according to claim 1, wherein the heat generator is installed individually for each of the output circuits. ### Claim 5 A temperature control system, comprising: a heater including: a heat generator installed for each of a plurality of control zones and configured to raise an internal temperature of a reaction tube by heat generation in each of the control zones; and a circuit configured to equalize resistance values in the respective control zones, wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit; and a temperature controller configured to control the internal temperature of the reaction tube by adjusting electric power supplied to the heat generator. ### Claim 6 (depends on 5) The system according to claim 5, wherein the temperature controller is further configured to output a different electric power for each of the control zones. ### Claim 7 (depends on 5) The system according to claim 5, wherein the temperature controller is further configured to output different electric powers in a vertical direction in each of the control zones. ### Claim 8 (depends on 5) The system according to claim 5, wherein the temperature controller is further configured to output a different electric power for each of the output circuits constituting the parallel circuit in the control zones. ### Claim 9 (depends on 5) The system according to claim 5, wherein the temperature controller is further configured to output electric power according to a resistance value of each of the output circuits constituting the parallel circuit in the control zones. ### Claim 10 (depends on 9) The system according to claim 9, wherein the temperature controller is further configured to make electric power output to an output circuit, among the output circuits constituting the parallel circuit, in which the output variable element is not installed larger than electric power output to an output circuit, among the output circuits constituting the parallel circuit, to which the output variable element is connected. ### Claim 11 (depends on 5) The system according to claim 5, further comprising: an adjuster configured to adjust electric power output from an output circuit, among the output circuits constituting the parallel circuit, to which the output variable element is connected, wherein the adjuster is further configured to output a different electric power for each of the output circuits. ### Claim 12 (depends on 11) The system according to claim 11, further comprising: a temperature control calculator configured to perform temperature control calculation such that a preset temperature and a temperature detected by a temperature detector match, wherein the adjuster is configured to determine an output to each of the output circuits based on a ratio of control signals calculated by the temperature control calculator. ### Claim 13 A processing apparatus, comprising a heater including: a heat generator installed for each of a plurality of control zones and configured to raise an internal temperature of a reaction tube by heat generation in each of the control zones; and a circuit configured to equalize resistance values in the respective control zones, wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit.