Magnetic drive apparatus, magnetizing method, and method of manufacturing the magnetic drive apparatus
AssigneeTokyo Electron Limited
InventorTakeshi KOBAYASHI
Life of this patent
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Abstract
There is provided a magnetic drive apparatus having a magnetic drive mechanism driven by a magnet. The magnetic drive apparatus includes a magnetizing yoke disposed in the magnetic drive apparatus at a standby position and configured to be moved to magnetize the magnet and a magnetizing yoke holder configured to hold the magnetizing yoke at a magnetizing position for magnetizing the magnet when the magnetic drive mechanism is stopped.
Claims19
A magnetic drive apparatus having a magnetic drive mechanism driven by a magnet, comprising:
- a magnetizing yoke disposed in the magnetic drive apparatus at a standby position and configured to be moved to magnetize the magnet;
- and
- a magnetizing yoke holder configured to hold the magnetizing yoke at a magnetizing position for magnetizing the magnet when the magnetic drive mechanism is stopped.
A magnetizing method comprising:
- magnetically driving a magnetic drive apparatus having a magnetic drive mechanism driven by a magnet;
- and
- magnetizing the magnet in a state e a magnetizing yoke faces the magnet when the magnetic drive mechanism is stopped.
A method of manufacturing a magnetic drive apparatus including a magnetic gear using magnetic coupling, comprising:
- assembling a first component having a first magnetic material and a second component having a second magnetic material in a non-magnetizing state;
- and
- magnetizing the first magnetic material and the second magnetic material by a magnetizing yoke to generate magnetic coupling between the first magnetic material and the second magnetic material and interposing the magnetic gear between the first component and the second component.
Dependencies are inferred from the claim text.